Proton-exchanged wet etching of recessed-structure SAW filter

Shih Hung Tsai, Na Fu Wang, Mau Phon Houng, Yeong Her Wang

研究成果: Letter

1 引文 (Scopus)

摘要

An improved method for fabricating recessed-structure surface acoustic wave (SAW) filters is reported. The relation between proton-exchanged duration and etched depth are studied, as well as the relation between internal reflection, etched depth, and thickness of the aluminum electrode. Experimental results show that the devices have superior performance, and ideas for further improvement of the fabricated SAW device are discussed.

原文English
頁(從 - 到)1219-1222
頁數4
期刊IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
50
發行號9
DOIs
出版狀態Published - 2003 九月 1

指紋

Acoustic surface wave filters
Acoustic surface wave devices
Wet etching
Protons
etching
Aluminum
filters
surface acoustic wave devices
Electrodes
protons
acoustics
aluminum
electrodes

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

引用此文

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AU - Tsai, Shih Hung

AU - Wang, Na Fu

AU - Houng, Mau Phon

AU - Wang, Yeong Her

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Y1 - 2003/9/1

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AB - An improved method for fabricating recessed-structure surface acoustic wave (SAW) filters is reported. The relation between proton-exchanged duration and etched depth are studied, as well as the relation between internal reflection, etched depth, and thickness of the aluminum electrode. Experimental results show that the devices have superior performance, and ideas for further improvement of the fabricated SAW device are discussed.

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JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

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ER -