Quantitative characterization of self-assembled coherent islands

Chuan Pu Liu, J. Murray Gibson

研究成果: Conference article同行評審

4 引文 斯高帕斯(Scopus)

摘要

We report on plan-view transmission electron microscopy techniques, by which the size, the actual shape and the strain of a coherent island in semiconductor heterostructures can be measured accurately. The bright-field suppressed-diffraction imaging condition where no strong diffracted beam is excited in the sample provides reliable size measurement as well as the detailed shape and aspect ratio. An exact two-beam diffraction condition is employed to produce the strain contrast of a coherent island and the corresponding fringes can be easily utilized to measure the average strain relaxation occurring during island evolution. We also propose an off-axis z contrast technique for the unambiguous determination of composition profile in an island. Finally examples of application of these techniques on the characterization of Ge coherent islands on Si(1 0 0) substrates are demonstrated.

原文English
頁(從 - 到)2-8
頁數7
期刊Thin Solid Films
424
發行號1
DOIs
出版狀態Published - 2003 一月 22
事件proceedings of the 1st Ineternational Conference on Materials - Singapore, Singapore
持續時間: 2001 七月 12001 七月 6

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 表面和介面
  • 表面、塗料和薄膜
  • 金屬和合金
  • 材料化學

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