Radio-frequency magnetron sputtering deposited ZnO-based TFBAR for humidity sensor applications

Chun Cheng Lin, Chun Ting Lin, Sheng Yuan Chu

研究成果: Conference contribution

摘要

This article investigates a thin-film bulk acoustic-wave resonator (TFBAR) based on Li-doped ZnO (LZO) film. The LZO thin-film is deposited by radio frequency (RF) magnetron sputtering system and post-treated with ultraviolet (UV)-ozone illumination. The microstructural and chemical evolutions via various illumination times of the predominantly c-axis orientation LZO films are investigated. The largest piezoelectric coefficient (12.66 pC/N) of the LZO film is obtained after 90 min UV-ozone illumination, which can be ascribed to better crystallization and fewer oxygen-related defects. Furthermore, the fabricated TFBAR exhibits a high quality factor (Q = 1358) at ∼500 MHz and a good sensitivity under several relative humidity levels (30∼90% at room temperature in a standard atmosphere). The experimental results verify the LZO-based TFBAR is a candidate for humidity sensor applications.

原文English
主出版物標題Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1-4
頁數4
ISBN(電子)9781538614457
DOIs
出版狀態Published - 2018 六月 22
事件7th International Symposium on Next-Generation Electronics, ISNE 2018 - Taipei, Taiwan
持續時間: 2018 五月 72018 五月 9

出版系列

名字Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018

Other

Other7th International Symposium on Next-Generation Electronics, ISNE 2018
國家Taiwan
城市Taipei
期間18-05-0718-05-09

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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