Radio-frequency microdischarge arrays for large-area cold atmospheric plasma generation

Yoou Bin Guo, Franklin Chau Nan Hong

研究成果: Article同行評審

54 引文 斯高帕斯(Scopus)

摘要

Radio-frequency microdischarge arrays for large-area cold atmospheric plasma generation were discussed. Gases flowed through arrays of microhollow cathode holes. Results showed that radio-frequency microhollow cathode discharges have lower ignition voltages and higher plasma stability and atmospheric plasma process is suitable for low coat plasma processing.

原文English
頁(從 - 到)337-339
頁數3
期刊Applied Physics Letters
82
發行號3
DOIs
出版狀態Published - 2003 一月 20

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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