Reactive magnetron sputtering of indium tin oxide films on acrylics - electrical resistivity and optical properties

Jow Lay Huang, Yin Tsan Jah, Ching Yun Chen, Bao Shun Yau, Su Shia Lin

研究成果: Article同行評審

7 引文 斯高帕斯(Scopus)

摘要

The effects of processing parameters on the deposition rate lattice parameters, stoichiometric compositions, surface morphology, and bonding state of indium tin oxide (ITO) films on acrylics had been previously reported. This study was a continuation of the previous investigation and focused on the electrical resistivity and optical properties of ITO films. The electrical resistivity decreased and then increased with oxygen flow rate. This was due to the effects of oxygen vacancies and impurity scattering. The resistivity of ITO films decreased with the applied bias voltage and film thickness. The transmittance of visible light increased with the oxygen flow rate and decreased with film thickness. Films deposited at oxygen flow rates having low electrical resistivity also had higher infrared radiation (IR) reflectance.

原文English
頁(從 - 到)424-427
頁數4
期刊Journal of Materials Engineering and Performance
9
發行號4
DOIs
出版狀態Published - 2000 八月 1

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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