Refinement of kernel and functional mechanisms for automatic virtual metrology system

Min Hsiung Hung, Chun Fang Chen, Yu Chuan Lin, Ming Yi Chou, Fan Tien Cheng

研究成果: Conference contribution

摘要

Virtual Metrology (VM) refers to a technology that is able to conjecture product quality using important parameter data of production equipment and proper prediction schemes. In an automatic VM system (AVMS), VM Manager is the core of system's operations and the communication bridge among subsystems because it is responsible for distributing commands to each subsystem and possessing access privilege to the central database. This paper aims to develop a new kernel and several functional mechanisms for VM Manager so that the AVMS with refined VM Manager can have superior overall execution efficiency than the original one. A paradigm AVMS with the refined VM Manager for the TFT-LCD industry is constructed and tested. Integrated testing results validate that the developed new kernel and functional mechanisms of VM Manager can indeed achieve the design objectives.

原文English
主出版物標題AIM 2012 - 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Conference Digest
頁面472-477
頁數6
DOIs
出版狀態Published - 2012 十月 5
事件2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2012 - Kaohsiung, Taiwan
持續時間: 2012 七月 112012 七月 14

出版系列

名字IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Other

Other2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2012
國家Taiwan
城市Kaohsiung
期間12-07-1112-07-14

    指紋

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Computer Science Applications
  • Electrical and Electronic Engineering

引用此

Hung, M. H., Chen, C. F., Lin, Y. C., Chou, M. Y., & Cheng, F. T. (2012). Refinement of kernel and functional mechanisms for automatic virtual metrology system. 於 AIM 2012 - 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Conference Digest (頁 472-477). [6265954] (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM). https://doi.org/10.1109/AIM.2012.6265954