Robust control design based on perturbation cancellation for micro-positioning design with hysteresis

Yung Yue Chen, Yu Jen Lan, Yi Qing Zhang

研究成果: Article同行評審

摘要

Based on the superiority of the piezoelectric elements, including lightweight, high electric mechanical transformation efficiency and a quick response time, a piezoelectric-based micro-positioning actuator is developed in this investigation. For eliminating the effects of hysteresis and modeling uncertainties that appeared in this micro-positioning actuator, a nonlinear adaptive fuzzy robust control design with a perturbation cancellation ability is proposed for this micro-positioning design to achieve a positioning resolution of 1 µm. Structurally, this proposed robust control methodology contains two particular parts: a universal fuzzy approximator and a robust compensator, which are employed to cancel the modeling uncertainties caused by the perturbed parts of the micro-positioning actuator and mitigate the approximation error between the modeling uncertainties and the universal fuzzy approximator, respectively. From both the numerical simulations and real validations, this proposed micro-positioning design performs a promising positioning performance in the micrometer level.

原文English
文章編號278
期刊Actuators
10
發行號11
DOIs
出版狀態Published - 2021 十一月

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 控制和優化

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