We design and fabricate a series of broadband silicon arbitrary power splitters with various split ratios using shortcuts to adiabaticity. In this approach, the system evolution is designed using the decoupled system states, and the desired split ratios are guaranteed by the boundary conditions. Furthermore, the system evolutions are optimized to be as close to the adiabatic states as possible, thus enhancing the robustness to wavelength and fabrication variations. The devices are more compact then the conventional adiabatic designs. Fabricated devices show broadband response for a wide wavelength range from 1.47 to 1.62 μm and also have excellent robustness against fabrication errors across an 8-inch wafer.
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