Roller-based laser assisted direct imprinting for nanofabrication

Yung Chun Lee, Chun Hsiang Chen, Cheng Yu Chiu, Shuo Hung Chang, Fuh Yu Chang, Hung Yi Lin, Wen Lang Lai

研究成果: Conference contribution

1 引文 (Scopus)

摘要

This paper reports an improved nanofabrication method based on laser-assisted direct imprinting (LADI) technology. The key element in this improvement is to introduce a quartz roller into the LADI process. The quartz roller optically focuses an incident UV laser light into a line onto a silicon substrate, and mechanically compresses a quartz mold against the silicon substrate. Under the action of both laser melting and mechanical pressure, the mold can imprint into the silicon and transfer the mold's surface features directly to the silicon substrate. This roller-type LADI approach has several significant advantages as compared to the original planar type LADI. It transforms the LADI process into a large-area, continuous, and high throughput nano-fabrication method. Experimental tests in this work demonstrate the direct fabrication of nano-structures of 500 nm line width with an imprinting speed of 5 × 60 mm2 per minute in a continuous configuration.

原文English
主出版物標題3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
頁面296-299
頁數4
DOIs
出版狀態Published - 2008 九月 1
事件3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
持續時間: 2008 一月 62008 一月 9

出版系列

名字3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
國家China
城市Sanya
期間08-01-0608-01-09

指紋

Nanotechnology
Lasers
Quartz
Silicon
Substrates
Linewidth
Melting
Throughput
Fabrication

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

引用此文

Lee, Y. C., Chen, C. H., Chiu, C. Y., Chang, S. H., Chang, F. Y., Lin, H. Y., & Lai, W. L. (2008). Roller-based laser assisted direct imprinting for nanofabrication. 於 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 (頁 296-299). [4484339] (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS). https://doi.org/10.1109/NEMS.2008.4484339
Lee, Yung Chun ; Chen, Chun Hsiang ; Chiu, Cheng Yu ; Chang, Shuo Hung ; Chang, Fuh Yu ; Lin, Hung Yi ; Lai, Wen Lang. / Roller-based laser assisted direct imprinting for nanofabrication. 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. 2008. 頁 296-299 (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).
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abstract = "This paper reports an improved nanofabrication method based on laser-assisted direct imprinting (LADI) technology. The key element in this improvement is to introduce a quartz roller into the LADI process. The quartz roller optically focuses an incident UV laser light into a line onto a silicon substrate, and mechanically compresses a quartz mold against the silicon substrate. Under the action of both laser melting and mechanical pressure, the mold can imprint into the silicon and transfer the mold's surface features directly to the silicon substrate. This roller-type LADI approach has several significant advantages as compared to the original planar type LADI. It transforms the LADI process into a large-area, continuous, and high throughput nano-fabrication method. Experimental tests in this work demonstrate the direct fabrication of nano-structures of 500 nm line width with an imprinting speed of 5 × 60 mm2 per minute in a continuous configuration.",
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Lee, YC, Chen, CH, Chiu, CY, Chang, SH, Chang, FY, Lin, HY & Lai, WL 2008, Roller-based laser assisted direct imprinting for nanofabrication. 於 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008., 4484339, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, 頁 296-299, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China, 08-01-06. https://doi.org/10.1109/NEMS.2008.4484339

Roller-based laser assisted direct imprinting for nanofabrication. / Lee, Yung Chun; Chen, Chun Hsiang; Chiu, Cheng Yu; Chang, Shuo Hung; Chang, Fuh Yu; Lin, Hung Yi; Lai, Wen Lang.

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. 2008. p. 296-299 4484339 (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

研究成果: Conference contribution

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AU - Lee, Yung Chun

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AU - Lai, Wen Lang

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N2 - This paper reports an improved nanofabrication method based on laser-assisted direct imprinting (LADI) technology. The key element in this improvement is to introduce a quartz roller into the LADI process. The quartz roller optically focuses an incident UV laser light into a line onto a silicon substrate, and mechanically compresses a quartz mold against the silicon substrate. Under the action of both laser melting and mechanical pressure, the mold can imprint into the silicon and transfer the mold's surface features directly to the silicon substrate. This roller-type LADI approach has several significant advantages as compared to the original planar type LADI. It transforms the LADI process into a large-area, continuous, and high throughput nano-fabrication method. Experimental tests in this work demonstrate the direct fabrication of nano-structures of 500 nm line width with an imprinting speed of 5 × 60 mm2 per minute in a continuous configuration.

AB - This paper reports an improved nanofabrication method based on laser-assisted direct imprinting (LADI) technology. The key element in this improvement is to introduce a quartz roller into the LADI process. The quartz roller optically focuses an incident UV laser light into a line onto a silicon substrate, and mechanically compresses a quartz mold against the silicon substrate. Under the action of both laser melting and mechanical pressure, the mold can imprint into the silicon and transfer the mold's surface features directly to the silicon substrate. This roller-type LADI approach has several significant advantages as compared to the original planar type LADI. It transforms the LADI process into a large-area, continuous, and high throughput nano-fabrication method. Experimental tests in this work demonstrate the direct fabrication of nano-structures of 500 nm line width with an imprinting speed of 5 × 60 mm2 per minute in a continuous configuration.

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Lee YC, Chen CH, Chiu CY, Chang SH, Chang FY, Lin HY 等. Roller-based laser assisted direct imprinting for nanofabrication. 於 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. 2008. p. 296-299. 4484339. (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS). https://doi.org/10.1109/NEMS.2008.4484339