Roller-based laser assisted direct imprinting for nanofabrication

Yung Chun Lee, Chun Hsiang Chen, Cheng Yu Chiu, Shuo Hung Chang, Fuh Yu Chang, Hung Yi Lin, Wen Lang Lai

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

This paper reports an improved nanofabrication method based on laser-assisted direct imprinting (LADI) technology. The key element in this improvement is to introduce a quartz roller into the LADI process. The quartz roller optically focuses an incident UV laser light into a line onto a silicon substrate, and mechanically compresses a quartz mold against the silicon substrate. Under the action of both laser melting and mechanical pressure, the mold can imprint into the silicon and transfer the mold's surface features directly to the silicon substrate. This roller-type LADI approach has several significant advantages as compared to the original planar type LADI. It transforms the LADI process into a large-area, continuous, and high throughput nano-fabrication method. Experimental tests in this work demonstrate the direct fabrication of nano-structures of 500 nm line width with an imprinting speed of 5 × 60 mm2 per minute in a continuous configuration.

原文English
主出版物標題3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
頁面296-299
頁數4
DOIs
出版狀態Published - 2008
事件3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
持續時間: 2008 1月 62008 1月 9

出版系列

名字3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
國家/地區China
城市Sanya
期間08-01-0608-01-09

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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