Room-temperature Fabrication of Amorphous IGZO TFTs with Co-sputtered ZrxSi1-xO2 Gate Dielectrics

Pang Yi Liu, Shui-Jinn Wang, Chien Hsiung Hung, Chien Hung Wu, Nai Sheng Wu, Yen Hao-Ping , Tseng Hsing Lin

研究成果: Conference contribution

原文English
主出版物標題2016 International Conference on Solid State Devices and Materials (SSDM’16)
出版地Tsukuba, Japan
出版狀態Published - 2016 九月 26

引用此

Liu, P. Y., Wang, S-J., Hung, C. H., Wu, C. H., Wu, N. S., Hao-Ping , Y., & Lin, T. H. (2016). Room-temperature Fabrication of Amorphous IGZO TFTs with Co-sputtered ZrxSi1-xO2 Gate Dielectrics. 於 2016 International Conference on Solid State Devices and Materials (SSDM’16)