Room-temperature Fabrication of Amorphous IGZO TFTs with Co-sputtered ZrxSi1-xO2 Gate Dielectrics

Pang Yi Liu, Shui-Jinn Wang, Chien Hsiung Hung, Chien Hung Wu, Nai Sheng Wu, Yen Hao-Ping , Tseng Hsing Lin

研究成果: Conference contribution

主出版物標題2016 International Conference on Solid State Devices and Materials (SSDM’16)
出版地Tsukuba, Japan
出版狀態Published - 2016 9月 26