摘要
The present invention relates to a novel method for roughening an epitaxy structure layer, including: providing an epitaxy structure layer; and etching a surface of the epitaxy structure layer by an excimer laser having an energy density of 1000 mJ/cm2 or less to form a roughened surface. In addition, the present invention further provides a method for manufacturing a light-emitting diode having a roughened surface. Accordingly, the present invention can resolve the conventional problems of process complexity, time consumption and high cost.
貢獻的翻譯標題 | 粗化方法及具粗化表面之發光二極體製備方法 |
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原文 | English |
專利號 | 8551869 |
出版狀態 | Published - 2012 8月 23 |