Scanning Electron Thermal Absorbance Microscopy for Light Element Detection and Atomic Number Analysis

Ching Che Lin, Shih Ming Wang, Bo Yi Chen, Cheng Hung Chi, I. Ling Chang, Chih Wei Chang

研究成果: Article同行評審

摘要

Recent developments in nanoscale thermal metrology using electron microscopy have made impressive advancements in measuring either phononic or thermal transport properties of nanoscale samples. However, its potential in material analysis has never been considered. Here we introduce a direct thermal absorbance measurement platform in scanning electron microscope (SEM) and demonstrate that its signal can be utilized for atomic number (Z) analysis at nanoscales. We prove that the measured absorbance of materials is complementary to signals of backscattering electrons but exhibits a much higher collection efficiency and signal-To-noise ratio. Thus, it not only enables successful detections of light elements/compounds under low acceleration voltages of SEM but also allows quantitative Z analyses in agreement with simulations. The direct thermal absorbance measurement platform would become an ideal tool for SEM, especially for thin films, light elements/compounds, or biological samples at nanoscales.

原文English
頁(從 - 到)2667-2673
頁數7
期刊Nano letters
22
發行號7
DOIs
出版狀態Published - 2022 4月 13

All Science Journal Classification (ASJC) codes

  • 生物工程
  • 化學 (全部)
  • 材料科學(全部)
  • 凝聚態物理學
  • 機械工業

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