Selective epitaxial silicon growth in high aspect ratio contact on 70 nm node flash memory

Ching Yuan Ho, Jr Hau He, Yuan Pul Chang, Chenhsin Lien

研究成果: Article

1 引文 斯高帕斯(Scopus)

指紋 深入研究「Selective epitaxial silicon growth in high aspect ratio contact on 70 nm node flash memory」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy