Selective patterning of indium tin oxide films using 1064 nm laser for micro parts processing

Kun Tse Tu, Chen-Kuei Chung

研究成果: Conference contribution

摘要

We report the experimental and analysis results of micro parts processing using 1064 nm Nd:YVO4 laser direct-write micro patterning of indium tin oxide (ITO) thin films and then followed by electroforming on the patterns. Compared with conventional photolithographic and etching technologies, direct-write micro-patterns of ITO using Nd:YVO4 laser at proper control can achieve high quality of surface without requiring numerous processing steps. Using diffractive multiple Nd:YVO4 beam, the ITO thin film could be removed without any damage to the glass structure. After laser patterning, a high overlapping area of laser spot was used to pattern the electrode layer on film surface for obtaining a fine ablated edge profile. Accordingly, the micro parts can be obtained using electroforming and release process via laser-patterned ITO films. The new micro parts processing is a maskless, dry and low-cost process instead of the complex photolithography, sputtering and sacrificial layer.

原文English
主出版物標題9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
發行者Institute of Electrical and Electronics Engineers Inc.
頁面382-385
頁數4
ISBN(電子)9781479947270
DOIs
出版狀態Published - 2014 九月 23
事件9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 - Waikiki Beach, United States
持續時間: 2014 四月 132014 四月 16

出版系列

名字9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Other

Other9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
國家/地區United States
城市Waikiki Beach
期間14-04-1314-04-16

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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