Self-assembled alternating nano-scaled layers

Wan Yu Wu, Jyh Ming Ting

研究成果: Conference contribution

摘要

This paper reports the use of a conventional sputter deposition technique to produce self-assembled alternating nano-scaled layers consisting of diamond-like carbon (DLC) and metal. A conventional sputter deposition technique produces alternating layers only when multiple sputtering targets are employed. However, we have successfully demonstrated that the use of only one single sputtering gun in a conventional sputter deposition process could lead to the formation of alternating nano-scaled layers through self-assembling. The microstructure of the alternating layers was examined as a function of the deposition parameters.

原文English
主出版物標題2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
發行者Nano Science and Technology Institute
頁面448-451
頁數4
ISBN(列印)0972842276, 9780972842273
出版狀態Published - 2004 一月 1
事件2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 - Boston, MA, United States
持續時間: 2004 三月 72004 三月 11

出版系列

名字2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
3

Other

Other2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
國家United States
城市Boston, MA
期間04-03-0704-03-11

    指紋

All Science Journal Classification (ASJC) codes

  • Engineering(all)

引用此

Wu, W. Y., & Ting, J. M. (2004). Self-assembled alternating nano-scaled layers. 於 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 (頁 448-451). (2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004; 卷 3). Nano Science and Technology Institute.