The structure and surface morphology of self-assembly vicinal surfaces (SAVSs) of Mo epitaxially grown on Al2 O3 (1 1- 02) substrates have been investigated by reflective high energy electron diffraction and scanning tunneling microscopy. The terrace edges for the Mo(001) SAVS are mainly arranged along [1 1- 0]Mo ∥ [11 2- 0] Al2 O3 with a narrow distribution terrace width. The structural analyses show that the formation of the SAVS is due to a tilt growth of Mo(001) plane with respect to Al2 O3 (1 1- 02) substrate. By a simple geometric model, the tilt growth and SAVS of Mo(001) can be attributed to the asymmetric lattice mismatch between Mo(001) and Al2 O3 (1 1- 02) surfaces.
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