Self-organized tantalum oxide nanopyramidal arrays for antireflective structure

A self-organized tantalum oxide nanopyramidal structure without tedious semiconductor processing is proposed in this letter. Construction of pyramid arrays with a close-packed periodicity of 200 nm and a height of 200 nm was achieved by the anodic alumina template method directly on the substrate. The tantalum oxide nanopyramidal structure was formed as the underlying tantalum film oxidized and localized precisely by the pore of alumina. The reflectance from the spectroscopic measurement suggests that the nanopyramidal array structures have more broadband antireflection (<2%) than the nanodot arrays and thin film structures.