The paper presents an innovative concept of self-parking ideal in v-groove and self-latching vertical mirror on the suspension diaphragm with technique out of plane fiber-optical switch arrays was fabricated. The self-parking ideal offers an integration by which the distance between optical fiber and mirror can be minimizes. The self-latching vertical mirror located on the suspension diaphragm that is supported by four cantilever beams. At first, it is achieved by bulk micromachining and is ablated by mask projection of 248nm excimer laser. The vertical mirror structure was fabricated by thick photoresist as SU-8 through UV lithography and then sputters gold films. The fiber-optical switch solves in plane micro-optical that require large moving space, microassembly problem of fiber to mirror distance and reducing the roughness of mirror surface. In the experiment, out of plane micro-optical switch are successfully achieved by above key process. By the measurement of roughness of mirror must be less than 20nm rms. The reflectivity of the gold films mirror by a wavelength of 1310nm is higher than 85%. The micro-optical switch has maximum displacement 48μm and switching time is below 0.4ms with of driving voltage 100V DC.
|頁（從 - 到）||404-412|
|期刊||Proceedings of SPIE - The International Society for Optical Engineering|
|出版狀態||Published - 2001|
|事件||MEMS Design, Fabrication, Characterization, and Packaging - Edinburgh, United Kingdom|
持續時間: 2001 五月 30 → 2001 六月 1
All Science Journal Classification (ASJC) codes