Self-powered hybrid humidity sensor and dual-band UV photodetector fabricated on back-contact photovoltaic cell

Y. M. Juan; S. J. Chang; H. T. Hsueh; T. C. Chen; S. W. Huang; Y. H. Lee; T. J. Hsueh; C. L. Wu

doi:10.1016/j.snb.2015.05.020

Self-powered hybrid humidity sensor and dual-band UV photodetector fabricated on back-contact photovoltaic cell

Y. M. Juan, S. J. Chang, H. T. Hsueh, T. C. Chen, S. W. Huang, Y. H. Lee, T. J. Hsueh, C. L. Wu

研究成果: Article › 同行評審

37 引文斯高帕斯（Scopus）

摘要

Self-powered multi-functional sensors were fabricated by integrating a crystalline Si interdigitated back-contact (IBC) photovoltaic (PV) cell with a vertically stacked structure into a single chip. The IBC PV cell was vertically connected with a humidity sensor and a photodetector (PD) in parallel. The measured humidity current of the WO₃ thin-film humidity sensor increased monotonically when the relative humidity was increased from 30% to 95%. In addition, the humidity characteristics of the unannealed WO₃ thin-film humidity sensor were better than those of the annealed samples. The cutoff wavelengths of WO₃ and Ga₂O₃ thin-film PDs were around 370 and 250 nm, respectively. The measured responsivity of WO₃ and Ga₂O₃ thin-film PDs at the cutoff wavelength were 1.7 × 10^-7 and 9.8 × 10^-7 A/W, respectively, under 1-sun illumination.

原文	English
頁（從 - 到）	43-49
頁數	7
期刊	Sensors and Actuators, B: Chemical
卷	219
DOIs	https://doi.org/10.1016/j.snb.2015.05.020
出版狀態	Published - 2015 5月 28

All Science Journal Classification (ASJC) codes

電子、光磁材料
儀器
凝聚態物理學
表面、塗料和薄膜
金屬和合金
電氣與電子工程
材料化學

UN SDG

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10.1016/j.snb.2015.05.020

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title = "Self-powered hybrid humidity sensor and dual-band UV photodetector fabricated on back-contact photovoltaic cell",

abstract = "Self-powered multi-functional sensors were fabricated by integrating a crystalline Si interdigitated back-contact (IBC) photovoltaic (PV) cell with a vertically stacked structure into a single chip. The IBC PV cell was vertically connected with a humidity sensor and a photodetector (PD) in parallel. The measured humidity current of the WO3 thin-film humidity sensor increased monotonically when the relative humidity was increased from 30% to 95%. In addition, the humidity characteristics of the unannealed WO3 thin-film humidity sensor were better than those of the annealed samples. The cutoff wavelengths of WO3 and Ga2O3 thin-film PDs were around 370 and 250 nm, respectively. The measured responsivity of WO3 and Ga2O3 thin-film PDs at the cutoff wavelength were 1.7 × 10-7 and 9.8 × 10-7 A/W, respectively, under 1-sun illumination.",

author = "Juan, {Y. M.} and Chang, {S. J.} and Hsueh, {H. T.} and Chen, {T. C.} and Huang, {S. W.} and Lee, {Y. H.} and Hsueh, {T. J.} and Wu, {C. L.}",

year = "2015",

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AU - Juan, Y. M.

AU - Chang, S. J.

AU - Hsueh, H. T.

AU - Chen, T. C.

AU - Huang, S. W.

AU - Lee, Y. H.

AU - Hsueh, T. J.

AU - Wu, C. L.

PY - 2015/5/28

Y1 - 2015/5/28

N2 - Self-powered multi-functional sensors were fabricated by integrating a crystalline Si interdigitated back-contact (IBC) photovoltaic (PV) cell with a vertically stacked structure into a single chip. The IBC PV cell was vertically connected with a humidity sensor and a photodetector (PD) in parallel. The measured humidity current of the WO3 thin-film humidity sensor increased monotonically when the relative humidity was increased from 30% to 95%. In addition, the humidity characteristics of the unannealed WO3 thin-film humidity sensor were better than those of the annealed samples. The cutoff wavelengths of WO3 and Ga2O3 thin-film PDs were around 370 and 250 nm, respectively. The measured responsivity of WO3 and Ga2O3 thin-film PDs at the cutoff wavelength were 1.7 × 10-7 and 9.8 × 10-7 A/W, respectively, under 1-sun illumination.

AB - Self-powered multi-functional sensors were fabricated by integrating a crystalline Si interdigitated back-contact (IBC) photovoltaic (PV) cell with a vertically stacked structure into a single chip. The IBC PV cell was vertically connected with a humidity sensor and a photodetector (PD) in parallel. The measured humidity current of the WO3 thin-film humidity sensor increased monotonically when the relative humidity was increased from 30% to 95%. In addition, the humidity characteristics of the unannealed WO3 thin-film humidity sensor were better than those of the annealed samples. The cutoff wavelengths of WO3 and Ga2O3 thin-film PDs were around 370 and 250 nm, respectively. The measured responsivity of WO3 and Ga2O3 thin-film PDs at the cutoff wavelength were 1.7 × 10-7 and 9.8 × 10-7 A/W, respectively, under 1-sun illumination.

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SP - 43

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JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

ER -

Self-powered hybrid humidity sensor and dual-band UV photodetector fabricated on back-contact photovoltaic cell

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