Simulation and characterization of a high-sensitive micro-opto-mechanical Microphone

H. Gao, C. H. Huang, W. Westerveld, R. Haouari, B. Troia, F. Verhaegen, R. Jansen, B. Figeys, X. Rottenberg, V. Rochus

研究成果: Conference contribution

4 引文 斯高帕斯(Scopus)

摘要

Micro-opto-mechanical Microphone (MOMM) based on integrated optical Mach-Zehnder interferometers (MZI) are promising for future application in medical environments. However, the design of next generation MOMM systems on chip remains challenging due to the intrinsic multi-physics characteristics related to acoustic, mechanical, optical and electrical effects. We therefore developed a methodology composed of acoustic, mechanic, optical, and electronic sections for fast design of high performance MOMM systems. The feasibility has been demonstrated as the operational characteristics of the fabricated MOMM (i.e. resonance frequency, dynamic range, the sensitivity and SNR) align well with the measured references.

原文English
主出版物標題2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1-4
頁數4
ISBN(電子)9781538623596
DOIs
出版狀態Published - 2018 5月 30
事件19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018 - Toulouse, France
持續時間: 2018 4月 152018 4月 18

出版系列

名字2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018

Other

Other19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018
國家/地區France
城市Toulouse
期間18-04-1518-04-18

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 流體流動和轉移過程
  • 電氣與電子工程
  • 安全、風險、可靠性和品質
  • 建模與模擬
  • 機械工業

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