Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons

Po An Chen, Jia Wei Lee, Meng Hsueh Chiang, Wei Chou Hsu

研究成果: Conference contribution

摘要

As the 2D materials are being developed for the era of the internet of things, a complete solution of integrated circuits including electronics devices and interconnects is needed. This work investigates the design issues and insights of the graphene interconnects with the defects stemming from oxygen plasma etching. The density functional theory and non-equilibrium Green’s function are used for simulations to investigate how the carrier transport mechanism is affected by the defects, including edge-roughness, oxygen-on-edge, and sp3-type cases. Design techniques to relieve the impact of defects are also provided.

原文English
主出版物標題ECS Transactions
編輯S. Bhansali, S. Brankovic, D. A. Buttry, D. Chu, H. Imahori, H. Katayama, O. Leonte, S. Mukerjee, R. Mukundan, Y. Oren, L. Romankiw, N. Sharma, A. Simonian, P. C. Trulove, J. T. Vaughey, M. Winter, P. N. Bartlett, V. Di Noto, M. Doeff, T. Druffel, J. M. Fenton, J. Fergus, Y. Fukunaka, M. Itagaki, J. Koehne, R. Kostecki, R. P. Lynch, I. Milosev, S. R. Narayan, V. Subramanian, T. Tatsuma, N. Wu, Z. Chen, L. M. Haverhals, P. Hesketh, A. C. Hillier, M. Inaba, G. Krumdick, J. Leddy, M. Manivannan, V. Maurice, S. Mitra, J. Muldoon, J. Noel, K. Rajeshwar, V. R. Subramanian, A. H. Suroviec, K. Suto, G. Zangari, P. Allongue, N. Birbilis, O. V. Boltalina, S. Calabrese Barton, V. Chaitanya, D. Chidambaram, J. K. Hite, J. J. Lee, R. A. Mantz, J. Mauzeroll, S. D. Minteer, M. E. Orazem, R. P. Ramasamy, D. P. Riemer, D. Roeper, M. Rohwerder, M. J. Sailor, D. T. Schwartz, J. A. Staser, G. Wu, H. Xu, R. Alkire, T. J. Anderson, M. Bayachou, A. B. Bocarsly, J. W. Choi, M. Innocenti, S. H. Kilgore, D. J. Kim, P. J. Kulesza, Y. C. Lu, P. Marcus, M. Mauter, J. D. Nicholas, S. Pylypenko, C. Rhodes, L. Soleymani, M. Tao, Y. Xing, A. P. Abbott, B. A. Chin, D. E. Cliffel, E. A. Douglas, K. Edstrom, H. Hamada, H. N. McMurray, Y. S. Meng, E. L. Miller, M. Navaei, S. S. Nonnenmann, C. O'Dwyer, P. Pharkya, S. V. Rotkin, J. L. M. Rupp, G. Williams, C. Bock, R. Buchheit, G. T. Cheek, H. Deligianni, C. Johnson, J. G. Park, P. N. Pintauro, K. C. Smith, P. Vanysek, H. Wang, J. F. Whitacre, J. Xiao, M. T. Carter, N. Dimitrov, J. Fransaer, D. Guyomard, B. L. Lucht, L. Nagahara, P. M. Natishan, P. K. Sekhar, D. K. Smith, G. R. Stafford, K. B. Sundaram, N. Vasiljevic, S. Virtanen, W. Wang, D. L. Wood, J. J. Yang
發行者Electrochemical Society Inc.
頁面463-471
頁數9
版本10
ISBN(電子)9781607685395
DOIs
出版狀態Published - 2017 一月 1
事件232nd ECS Meeting - National Harbor, United States
持續時間: 2017 十月 12017 十月 5

出版系列

名字ECS Transactions
號碼10
80
ISSN(列印)1938-6737
ISSN(電子)1938-5862

Other

Other232nd ECS Meeting
國家United States
城市National Harbor
期間17-10-0117-10-05

指紋

Nanoribbons
Graphene
Plasmas
Defects
Oxygen
Carrier transport
Plasma etching
Green's function
Density functional theory
Integrated circuits
Electronic equipment
Surface roughness

All Science Journal Classification (ASJC) codes

  • Engineering(all)

引用此文

Chen, P. A., Lee, J. W., Chiang, M. H., & Hsu, W. C. (2017). Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons. 於 S. Bhansali, S. Brankovic, D. A. Buttry, D. Chu, H. Imahori, H. Katayama, O. Leonte, S. Mukerjee, R. Mukundan, Y. Oren, L. Romankiw, N. Sharma, A. Simonian, P. C. Trulove, J. T. Vaughey, M. Winter, P. N. Bartlett, V. Di Noto, M. Doeff, T. Druffel, J. M. Fenton, J. Fergus, Y. Fukunaka, M. Itagaki, J. Koehne, R. Kostecki, R. P. Lynch, I. Milosev, S. R. Narayan, V. Subramanian, T. Tatsuma, N. Wu, Z. Chen, L. M. Haverhals, P. Hesketh, A. C. Hillier, M. Inaba, G. Krumdick, J. Leddy, M. Manivannan, V. Maurice, S. Mitra, J. Muldoon, J. Noel, K. Rajeshwar, V. R. Subramanian, A. H. Suroviec, K. Suto, G. Zangari, P. Allongue, N. Birbilis, O. V. Boltalina, S. Calabrese Barton, V. Chaitanya, D. Chidambaram, J. K. Hite, J. J. Lee, R. A. Mantz, J. Mauzeroll, S. D. Minteer, M. E. Orazem, R. P. Ramasamy, D. P. Riemer, D. Roeper, M. Rohwerder, M. J. Sailor, D. T. Schwartz, J. A. Staser, G. Wu, H. Xu, R. Alkire, T. J. Anderson, M. Bayachou, A. B. Bocarsly, J. W. Choi, M. Innocenti, S. H. Kilgore, D. J. Kim, P. J. Kulesza, Y. C. Lu, P. Marcus, M. Mauter, J. D. Nicholas, S. Pylypenko, C. Rhodes, L. Soleymani, M. Tao, Y. Xing, A. P. Abbott, B. A. Chin, D. E. Cliffel, E. A. Douglas, K. Edstrom, H. Hamada, H. N. McMurray, Y. S. Meng, E. L. Miller, M. Navaei, S. S. Nonnenmann, C. O'Dwyer, P. Pharkya, S. V. Rotkin, J. L. M. Rupp, G. Williams, C. Bock, R. Buchheit, G. T. Cheek, H. Deligianni, C. Johnson, J. G. Park, P. N. Pintauro, K. C. Smith, P. Vanysek, H. Wang, J. F. Whitacre, J. Xiao, M. T. Carter, N. Dimitrov, J. Fransaer, D. Guyomard, B. L. Lucht, L. Nagahara, P. M. Natishan, P. K. Sekhar, D. K. Smith, G. R. Stafford, K. B. Sundaram, N. Vasiljevic, S. Virtanen, W. Wang, D. L. Wood, ... J. J. Yang (編輯), ECS Transactions (10 編輯, 頁 463-471). (ECS Transactions; 卷 80, 編號 10). Electrochemical Society Inc.. https://doi.org/10.1149/08010.0463ecst
Chen, Po An ; Lee, Jia Wei ; Chiang, Meng Hsueh ; Hsu, Wei Chou. / Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons. ECS Transactions. 編輯 / S. Bhansali ; S. Brankovic ; D. A. Buttry ; D. Chu ; H. Imahori ; H. Katayama ; O. Leonte ; S. Mukerjee ; R. Mukundan ; Y. Oren ; L. Romankiw ; N. Sharma ; A. Simonian ; P. C. Trulove ; J. T. Vaughey ; M. Winter ; P. N. Bartlett ; V. Di Noto ; M. Doeff ; T. Druffel ; J. M. Fenton ; J. Fergus ; Y. Fukunaka ; M. Itagaki ; J. Koehne ; R. Kostecki ; R. P. Lynch ; I. Milosev ; S. R. Narayan ; V. Subramanian ; T. Tatsuma ; N. Wu ; Z. Chen ; L. M. Haverhals ; P. Hesketh ; A. C. Hillier ; M. Inaba ; G. Krumdick ; J. Leddy ; M. Manivannan ; V. Maurice ; S. Mitra ; J. Muldoon ; J. Noel ; K. Rajeshwar ; V. R. Subramanian ; A. H. Suroviec ; K. Suto ; G. Zangari ; P. Allongue ; N. Birbilis ; O. V. Boltalina ; S. Calabrese Barton ; V. Chaitanya ; D. Chidambaram ; J. K. Hite ; J. J. Lee ; R. A. Mantz ; J. Mauzeroll ; S. D. Minteer ; M. E. Orazem ; R. P. Ramasamy ; D. P. Riemer ; D. Roeper ; M. Rohwerder ; M. J. Sailor ; D. T. Schwartz ; J. A. Staser ; G. Wu ; H. Xu ; R. Alkire ; T. J. Anderson ; M. Bayachou ; A. B. Bocarsly ; J. W. Choi ; M. Innocenti ; S. H. Kilgore ; D. J. Kim ; P. J. Kulesza ; Y. C. Lu ; P. Marcus ; M. Mauter ; J. D. Nicholas ; S. Pylypenko ; C. Rhodes ; L. Soleymani ; M. Tao ; Y. Xing ; A. P. Abbott ; B. A. Chin ; D. E. Cliffel ; E. A. Douglas ; K. Edstrom ; H. Hamada ; H. N. McMurray ; Y. S. Meng ; E. L. Miller ; M. Navaei ; S. S. Nonnenmann ; C. O'Dwyer ; P. Pharkya ; S. V. Rotkin ; J. L. M. Rupp ; G. Williams ; C. Bock ; R. Buchheit ; G. T. Cheek ; H. Deligianni ; C. Johnson ; J. G. Park ; P. N. Pintauro ; K. C. Smith ; P. Vanysek ; H. Wang ; J. F. Whitacre ; J. Xiao ; M. T. Carter ; N. Dimitrov ; J. Fransaer ; D. Guyomard ; B. L. Lucht ; L. Nagahara ; P. M. Natishan ; P. K. Sekhar ; D. K. Smith ; G. R. Stafford ; K. B. Sundaram ; N. Vasiljevic ; S. Virtanen ; W. Wang ; D. L. Wood ; J. J. Yang. 10. 編輯 Electrochemical Society Inc., 2017. 頁 463-471 (ECS Transactions; 10).
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Chen, PA, Lee, JW, Chiang, MH & Hsu, WC 2017, Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons. 於 S Bhansali, S Brankovic, DA Buttry, D Chu, H Imahori, H Katayama, O Leonte, S Mukerjee, R Mukundan, Y Oren, L Romankiw, N Sharma, A Simonian, PC Trulove, JT Vaughey, M Winter, PN Bartlett, V Di Noto, M Doeff, T Druffel, JM Fenton, J Fergus, Y Fukunaka, M Itagaki, J Koehne, R Kostecki, RP Lynch, I Milosev, SR Narayan, V Subramanian, T Tatsuma, N Wu, Z Chen, LM Haverhals, P Hesketh, AC Hillier, M Inaba, G Krumdick, J Leddy, M Manivannan, V Maurice, S Mitra, J Muldoon, J Noel, K Rajeshwar, VR Subramanian, AH Suroviec, K Suto, G Zangari, P Allongue, N Birbilis, OV Boltalina, S Calabrese Barton, V Chaitanya, D Chidambaram, JK Hite, JJ Lee, RA Mantz, J Mauzeroll, SD Minteer, ME Orazem, RP Ramasamy, DP Riemer, D Roeper, M Rohwerder, MJ Sailor, DT Schwartz, JA Staser, G Wu, H Xu, R Alkire, TJ Anderson, M Bayachou, AB Bocarsly, JW Choi, M Innocenti, SH Kilgore, DJ Kim, PJ Kulesza, YC Lu, P Marcus, M Mauter, JD Nicholas, S Pylypenko, C Rhodes, L Soleymani, M Tao, Y Xing, AP Abbott, BA Chin, DE Cliffel, EA Douglas, K Edstrom, H Hamada, HN McMurray, YS Meng, EL Miller, M Navaei, SS Nonnenmann, C O'Dwyer, P Pharkya, SV Rotkin, JLM Rupp, G Williams, C Bock, R Buchheit, GT Cheek, H Deligianni, C Johnson, JG Park, PN Pintauro, KC Smith, P Vanysek, H Wang, JF Whitacre, J Xiao, MT Carter, N Dimitrov, J Fransaer, D Guyomard, BL Lucht, L Nagahara, PM Natishan, PK Sekhar, DK Smith, GR Stafford, KB Sundaram, N Vasiljevic, S Virtanen, W Wang, DL Wood & JJ Yang (編輯), ECS Transactions. 10 edn, ECS Transactions, 編號 10, 卷 80, Electrochemical Society Inc., 頁 463-471, 232nd ECS Meeting, National Harbor, United States, 17-10-01. https://doi.org/10.1149/08010.0463ecst

Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons. / Chen, Po An; Lee, Jia Wei; Chiang, Meng Hsueh; Hsu, Wei Chou.

ECS Transactions. 編輯 / S. Bhansali; S. Brankovic; D. A. Buttry; D. Chu; H. Imahori; H. Katayama; O. Leonte; S. Mukerjee; R. Mukundan; Y. Oren; L. Romankiw; N. Sharma; A. Simonian; P. C. Trulove; J. T. Vaughey; M. Winter; P. N. Bartlett; V. Di Noto; M. Doeff; T. Druffel; J. M. Fenton; J. Fergus; Y. Fukunaka; M. Itagaki; J. Koehne; R. Kostecki; R. P. Lynch; I. Milosev; S. R. Narayan; V. Subramanian; T. Tatsuma; N. Wu; Z. Chen; L. M. Haverhals; P. Hesketh; A. C. Hillier; M. Inaba; G. Krumdick; J. Leddy; M. Manivannan; V. Maurice; S. Mitra; J. Muldoon; J. Noel; K. Rajeshwar; V. R. Subramanian; A. H. Suroviec; K. Suto; G. Zangari; P. Allongue; N. Birbilis; O. V. Boltalina; S. Calabrese Barton; V. Chaitanya; D. Chidambaram; J. K. Hite; J. J. Lee; R. A. Mantz; J. Mauzeroll; S. D. Minteer; M. E. Orazem; R. P. Ramasamy; D. P. Riemer; D. Roeper; M. Rohwerder; M. J. Sailor; D. T. Schwartz; J. A. Staser; G. Wu; H. Xu; R. Alkire; T. J. Anderson; M. Bayachou; A. B. Bocarsly; J. W. Choi; M. Innocenti; S. H. Kilgore; D. J. Kim; P. J. Kulesza; Y. C. Lu; P. Marcus; M. Mauter; J. D. Nicholas; S. Pylypenko; C. Rhodes; L. Soleymani; M. Tao; Y. Xing; A. P. Abbott; B. A. Chin; D. E. Cliffel; E. A. Douglas; K. Edstrom; H. Hamada; H. N. McMurray; Y. S. Meng; E. L. Miller; M. Navaei; S. S. Nonnenmann; C. O'Dwyer; P. Pharkya; S. V. Rotkin; J. L. M. Rupp; G. Williams; C. Bock; R. Buchheit; G. T. Cheek; H. Deligianni; C. Johnson; J. G. Park; P. N. Pintauro; K. C. Smith; P. Vanysek; H. Wang; J. F. Whitacre; J. Xiao; M. T. Carter; N. Dimitrov; J. Fransaer; D. Guyomard; B. L. Lucht; L. Nagahara; P. M. Natishan; P. K. Sekhar; D. K. Smith; G. R. Stafford; K. B. Sundaram; N. Vasiljevic; S. Virtanen; W. Wang; D. L. Wood; J. J. Yang. 10. 編輯 Electrochemical Society Inc., 2017. p. 463-471 (ECS Transactions; 卷 80, 編號 10).

研究成果: Conference contribution

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AU - Chen, Po An

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Y1 - 2017/1/1

N2 - As the 2D materials are being developed for the era of the internet of things, a complete solution of integrated circuits including electronics devices and interconnects is needed. This work investigates the design issues and insights of the graphene interconnects with the defects stemming from oxygen plasma etching. The density functional theory and non-equilibrium Green’s function are used for simulations to investigate how the carrier transport mechanism is affected by the defects, including edge-roughness, oxygen-on-edge, and sp3-type cases. Design techniques to relieve the impact of defects are also provided.

AB - As the 2D materials are being developed for the era of the internet of things, a complete solution of integrated circuits including electronics devices and interconnects is needed. This work investigates the design issues and insights of the graphene interconnects with the defects stemming from oxygen plasma etching. The density functional theory and non-equilibrium Green’s function are used for simulations to investigate how the carrier transport mechanism is affected by the defects, including edge-roughness, oxygen-on-edge, and sp3-type cases. Design techniques to relieve the impact of defects are also provided.

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BT - ECS Transactions

A2 - Bhansali, S.

A2 - Brankovic, S.

A2 - Buttry, D. A.

A2 - Chu, D.

A2 - Imahori, H.

A2 - Katayama, H.

A2 - Leonte, O.

A2 - Mukerjee, S.

A2 - Mukundan, R.

A2 - Oren, Y.

A2 - Romankiw, L.

A2 - Sharma, N.

A2 - Simonian, A.

A2 - Trulove, P. C.

A2 - Vaughey, J. T.

A2 - Winter, M.

A2 - Bartlett, P. N.

A2 - Di Noto, V.

A2 - Doeff, M.

A2 - Druffel, T.

A2 - Fenton, J. M.

A2 - Fergus, J.

A2 - Fukunaka, Y.

A2 - Itagaki, M.

A2 - Koehne, J.

A2 - Kostecki, R.

A2 - Lynch, R. P.

A2 - Milosev, I.

A2 - Narayan, S. R.

A2 - Subramanian, V.

A2 - Tatsuma, T.

A2 - Wu, N.

A2 - Chen, Z.

A2 - Haverhals, L. M.

A2 - Hesketh, P.

A2 - Hillier, A. C.

A2 - Inaba, M.

A2 - Krumdick, G.

A2 - Leddy, J.

A2 - Manivannan, M.

A2 - Maurice, V.

A2 - Mitra, S.

A2 - Muldoon, J.

A2 - Noel, J.

A2 - Rajeshwar, K.

A2 - Subramanian, V. R.

A2 - Suroviec, A. H.

A2 - Suto, K.

A2 - Zangari, G.

A2 - Allongue, P.

A2 - Birbilis, N.

A2 - Boltalina, O. V.

A2 - Calabrese Barton, S.

A2 - Chaitanya, V.

A2 - Chidambaram, D.

A2 - Hite, J. K.

A2 - Lee, J. J.

A2 - Mantz, R. A.

A2 - Mauzeroll, J.

A2 - Minteer, S. D.

A2 - Orazem, M. E.

A2 - Ramasamy, R. P.

A2 - Riemer, D. P.

A2 - Roeper, D.

A2 - Rohwerder, M.

A2 - Sailor, M. J.

A2 - Schwartz, D. T.

A2 - Staser, J. A.

A2 - Wu, G.

A2 - Xu, H.

A2 - Alkire, R.

A2 - Anderson, T. J.

A2 - Bayachou, M.

A2 - Bocarsly, A. B.

A2 - Choi, J. W.

A2 - Innocenti, M.

A2 - Kilgore, S. H.

A2 - Kim, D. J.

A2 - Kulesza, P. J.

A2 - Lu, Y. C.

A2 - Marcus, P.

A2 - Mauter, M.

A2 - Nicholas, J. D.

A2 - Pylypenko, S.

A2 - Rhodes, C.

A2 - Soleymani, L.

A2 - Tao, M.

A2 - Xing, Y.

A2 - Abbott, A. P.

A2 - Chin, B. A.

A2 - Cliffel, D. E.

A2 - Douglas, E. A.

A2 - Edstrom, K.

A2 - Hamada, H.

A2 - McMurray, H. N.

A2 - Meng, Y. S.

A2 - Miller, E. L.

A2 - Navaei, M.

A2 - Nonnenmann, S. S.

A2 - O'Dwyer, C.

A2 - Pharkya, P.

A2 - Rotkin, S. V.

A2 - Rupp, J. L. M.

A2 - Williams, G.

A2 - Bock, C.

A2 - Buchheit, R.

A2 - Cheek, G. T.

A2 - Deligianni, H.

A2 - Johnson, C.

A2 - Park, J. G.

A2 - Pintauro, P. N.

A2 - Smith, K. C.

A2 - Vanysek, P.

A2 - Wang, H.

A2 - Whitacre, J. F.

A2 - Xiao, J.

A2 - Carter, M. T.

A2 - Dimitrov, N.

A2 - Fransaer, J.

A2 - Guyomard, D.

A2 - Lucht, B. L.

A2 - Nagahara, L.

A2 - Natishan, P. M.

A2 - Sekhar, P. K.

A2 - Smith, D. K.

A2 - Stafford, G. R.

A2 - Sundaram, K. B.

A2 - Vasiljevic, N.

A2 - Virtanen, S.

A2 - Wang, W.

A2 - Wood, D. L.

A2 - Yang, J. J.

PB - Electrochemical Society Inc.

ER -

Chen PA, Lee JW, Chiang MH, Hsu WC. Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons. 於 Bhansali S, Brankovic S, Buttry DA, Chu D, Imahori H, Katayama H, Leonte O, Mukerjee S, Mukundan R, Oren Y, Romankiw L, Sharma N, Simonian A, Trulove PC, Vaughey JT, Winter M, Bartlett PN, Di Noto V, Doeff M, Druffel T, Fenton JM, Fergus J, Fukunaka Y, Itagaki M, Koehne J, Kostecki R, Lynch RP, Milosev I, Narayan SR, Subramanian V, Tatsuma T, Wu N, Chen Z, Haverhals LM, Hesketh P, Hillier AC, Inaba M, Krumdick G, Leddy J, Manivannan M, Maurice V, Mitra S, Muldoon J, Noel J, Rajeshwar K, Subramanian VR, Suroviec AH, Suto K, Zangari G, Allongue P, Birbilis N, Boltalina OV, Calabrese Barton S, Chaitanya V, Chidambaram D, Hite JK, Lee JJ, Mantz RA, Mauzeroll J, Minteer SD, Orazem ME, Ramasamy RP, Riemer DP, Roeper D, Rohwerder M, Sailor MJ, Schwartz DT, Staser JA, Wu G, Xu H, Alkire R, Anderson TJ, Bayachou M, Bocarsly AB, Choi JW, Innocenti M, Kilgore SH, Kim DJ, Kulesza PJ, Lu YC, Marcus P, Mauter M, Nicholas JD, Pylypenko S, Rhodes C, Soleymani L, Tao M, Xing Y, Abbott AP, Chin BA, Cliffel DE, Douglas EA, Edstrom K, Hamada H, McMurray HN, Meng YS, Miller EL, Navaei M, Nonnenmann SS, O'Dwyer C, Pharkya P, Rotkin SV, Rupp JLM, Williams G, Bock C, Buchheit R, Cheek GT, Deligianni H, Johnson C, Park JG, Pintauro PN, Smith KC, Vanysek P, Wang H, Whitacre JF, Xiao J, Carter MT, Dimitrov N, Fransaer J, Guyomard D, Lucht BL, Nagahara L, Natishan PM, Sekhar PK, Smith DK, Stafford GR, Sundaram KB, Vasiljevic N, Virtanen S, Wang W, Wood DL, Yang JJ, 編輯, ECS Transactions. 10 編輯 Electrochemical Society Inc. 2017. p. 463-471. (ECS Transactions; 10). https://doi.org/10.1149/08010.0463ecst