Simulation metamodel development using uniform design and neural networks for automated material handling systems in semiconductor wafer fabrication

Yiyo Kuo, Taho Yang, Brett A. Peters, Ihui Chang

研究成果: Article同行評審

51 引文 斯高帕斯(Scopus)

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深入研究「Simulation metamodel development using uniform design and neural networks for automated material handling systems in semiconductor wafer fabrication」主題。共同形成了獨特的指紋。

Mathematics

Engineering & Materials Science