摘要
The different focusing structures are simulated by the MAGIC particle-on-cell code cell program. The normal devices without focusing structures are also studied for comparison. The narrow or wide gate width means that the simulated outer gate width does not extend or extends to the simulation boundary. The voltages applied on the cathode electrode, the gate electrode, and the focus electrode are 0, 80, and 0 V, respectively. An anode plate with 4 kV is placed 1 mm away from and parallel to the cathode plate.
原文 | English |
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頁(從 - 到) | 911-913 |
頁數 | 3 |
期刊 | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
卷 | 18 |
發行號 | 2 |
DOIs | |
出版狀態 | Published - 2000 3月 |
All Science Journal Classification (ASJC) codes
- 凝聚態物理學
- 電氣與電子工程