Single-Axis Capacitive Accelerometer Chip with AC Offset Suppression Loop

Heng Yu Chiu; Shih Meng Tseng; Yi Chen Chen; Chia Ling Wei

doi:10.1109/ISCAS48785.2022.9937688

Single-Axis Capacitive Accelerometer Chip with AC Offset Suppression Loop

Heng Yu Chiu, Shih Meng Tseng, Yi Chen Chen, Chia Ling Wei

電機工程學系

研究成果: Conference contribution

摘要

A single-axis capacitive accelerometer chip with AC offset voltage cancellation function is proposed, and it consists of the front-end MEMS acceleration sensor and the back-end CMOS signal processing circuits. In fact, an AC offset suppression loop is proposed to cancel the AC offset voltage originated from the initial capacitance mismatches of the MEMS acceleration sensor. The proposed chip was fabricated by using TSMC 0.35μm2P4M mixed-signal standard CMOS process and MEMS post process. Including pads, the chip area is 2.43× 2.07mm2, and the measured sensitivity is 120.4 mVpp/g within the ± 9g sensing range.

原文	English
主出版物標題	IEEE International Symposium on Circuits and Systems, ISCAS 2022
發行者	Institute of Electrical and Electronics Engineers Inc.
頁面	2397-2400
頁數	4
ISBN（電子）	9781665484855
DOIs	https://doi.org/10.1109/ISCAS48785.2022.9937688
出版狀態	Published - 2022
事件	2022 IEEE International Symposium on Circuits and Systems, ISCAS 2022 - Austin, United States 持續時間: 2022 5月 27 → 2022 6月 1

出版系列

名字	Proceedings - IEEE International Symposium on Circuits and Systems
卷	2022-May
ISSN（列印）	0271-4310

Conference

Conference	2022 IEEE International Symposium on Circuits and Systems, ISCAS 2022
國家/地區	United States
城市	Austin
期間	22-05-27 → 22-06-01

All Science Journal Classification (ASJC) codes

電氣與電子工程

存取文件

10.1109/ISCAS48785.2022.9937688

其它文件與鏈接

引用此

Chiu, H. Y., Tseng, S. M., Chen, Y. C., & Wei, C. L. (2022). Single-Axis Capacitive Accelerometer Chip with AC Offset Suppression Loop. 於 IEEE International Symposium on Circuits and Systems, ISCAS 2022 (頁 2397-2400). (Proceedings - IEEE International Symposium on Circuits and Systems; 卷 2022-May). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISCAS48785.2022.9937688

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title = "Single-Axis Capacitive Accelerometer Chip with AC Offset Suppression Loop",

abstract = "A single-axis capacitive accelerometer chip with AC offset voltage cancellation function is proposed, and it consists of the front-end MEMS acceleration sensor and the back-end CMOS signal processing circuits. In fact, an AC offset suppression loop is proposed to cancel the AC offset voltage originated from the initial capacitance mismatches of the MEMS acceleration sensor. The proposed chip was fabricated by using TSMC 0.35μm2P4M mixed-signal standard CMOS process and MEMS post process. Including pads, the chip area is 2.43× 2.07mm2, and the measured sensitivity is 120.4 mVpp/g within the ± 9g sensing range.",

author = "Chiu, {Heng Yu} and Tseng, {Shih Meng} and Chen, {Yi Chen} and Wei, {Chia Ling}",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE International Symposium on Circuits and Systems, ISCAS 2022 ; Conference date: 27-05-2022 Through 01-06-2022",

year = "2022",

doi = "10.1109/ISCAS48785.2022.9937688",

language = "English",

series = "Proceedings - IEEE International Symposium on Circuits and Systems",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "2397--2400",

booktitle = "IEEE International Symposium on Circuits and Systems, ISCAS 2022",

address = "United States",

}

Chiu, HY, Tseng, SM, Chen, YC & Wei, CL 2022, Single-Axis Capacitive Accelerometer Chip with AC Offset Suppression Loop. 於 IEEE International Symposium on Circuits and Systems, ISCAS 2022. Proceedings - IEEE International Symposium on Circuits and Systems, 卷 2022-May, Institute of Electrical and Electronics Engineers Inc., 頁 2397-2400, 2022 IEEE International Symposium on Circuits and Systems, ISCAS 2022, Austin, United States, 22-05-27. https://doi.org/10.1109/ISCAS48785.2022.9937688

Single-Axis Capacitive Accelerometer Chip with AC Offset Suppression Loop. / Chiu, Heng Yu; Tseng, Shih Meng; Chen, Yi Chen 等.

IEEE International Symposium on Circuits and Systems, ISCAS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 2397-2400 (Proceedings - IEEE International Symposium on Circuits and Systems; 卷 2022-May).

研究成果: Conference contribution

TY - GEN

T1 - Single-Axis Capacitive Accelerometer Chip with AC Offset Suppression Loop

AU - Chiu, Heng Yu

AU - Tseng, Shih Meng

AU - Chen, Yi Chen

AU - Wei, Chia Ling

PY - 2022

Y1 - 2022

N2 - A single-axis capacitive accelerometer chip with AC offset voltage cancellation function is proposed, and it consists of the front-end MEMS acceleration sensor and the back-end CMOS signal processing circuits. In fact, an AC offset suppression loop is proposed to cancel the AC offset voltage originated from the initial capacitance mismatches of the MEMS acceleration sensor. The proposed chip was fabricated by using TSMC 0.35μm2P4M mixed-signal standard CMOS process and MEMS post process. Including pads, the chip area is 2.43× 2.07mm2, and the measured sensitivity is 120.4 mVpp/g within the ± 9g sensing range.

AB - A single-axis capacitive accelerometer chip with AC offset voltage cancellation function is proposed, and it consists of the front-end MEMS acceleration sensor and the back-end CMOS signal processing circuits. In fact, an AC offset suppression loop is proposed to cancel the AC offset voltage originated from the initial capacitance mismatches of the MEMS acceleration sensor. The proposed chip was fabricated by using TSMC 0.35μm2P4M mixed-signal standard CMOS process and MEMS post process. Including pads, the chip area is 2.43× 2.07mm2, and the measured sensitivity is 120.4 mVpp/g within the ± 9g sensing range.

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U2 - 10.1109/ISCAS48785.2022.9937688

DO - 10.1109/ISCAS48785.2022.9937688

M3 - Conference contribution

AN - SCOPUS:85142513178

T3 - Proceedings - IEEE International Symposium on Circuits and Systems

SP - 2397

EP - 2400

BT - IEEE International Symposium on Circuits and Systems, ISCAS 2022

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2022 IEEE International Symposium on Circuits and Systems, ISCAS 2022

Y2 - 27 May 2022 through 1 June 2022

ER -

Single-Axis Capacitive Accelerometer Chip with AC Offset Suppression Loop

摘要

出版系列

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All Science Journal Classification (ASJC) codes

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