TY - GEN
T1 - Single-battery-powered CMOS/MEMS respiration detection monolithic chip
AU - Yu, Chung Ming
AU - Tsai, Ming Ke
AU - Chiu, Heng Yu
AU - Wei, Chia Ling
N1 - Funding Information:
This work was supported in part by the Ministry of Science and Technology, Taiwan, under Grants NSC 102-2221-E-006-284-MY3 and MOST 105-2628-E-006-008-MY3.
Publisher Copyright:
© 2019 IEEE
PY - 2019
Y1 - 2019
N2 - This work proposes a respiration detection monolithic chip, which integrates MEMS sensors, CMOS sensing circuits, an analog-to-digital converter, and three low dropout regulators into a single chip. Hence, this chip can be directly powered by a single Li-ion battery. The proposed chip was designed and fabricated using TSMC 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Moreover, to solve the issue of particle deposition, it tries to cover the proposed chip with a thin and soft layer of polydimethylsiloxane.
AB - This work proposes a respiration detection monolithic chip, which integrates MEMS sensors, CMOS sensing circuits, an analog-to-digital converter, and three low dropout regulators into a single chip. Hence, this chip can be directly powered by a single Li-ion battery. The proposed chip was designed and fabricated using TSMC 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Moreover, to solve the issue of particle deposition, it tries to cover the proposed chip with a thin and soft layer of polydimethylsiloxane.
UR - http://www.scopus.com/inward/record.url?scp=85066814153&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85066814153&partnerID=8YFLogxK
U2 - 10.1109/ISCAS.2019.8702291
DO - 10.1109/ISCAS.2019.8702291
M3 - Conference contribution
AN - SCOPUS:85066814153
T3 - Proceedings - IEEE International Symposium on Circuits and Systems
BT - 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019
Y2 - 26 May 2019 through 29 May 2019
ER -