Solution flow system for hydrothermal-electrochemical synthesis: new opportunities for multilayered oxide films

W. Suchanek, T. Watanabe, B. Sakurai, M. Yoshimura

研究成果: Conference article同行評審

5 引文 斯高帕斯(Scopus)

摘要

A solution flow system for hydrothermal-electrochemical synthesis has been constructed in our laboratory. This equipment can operate at 20°-200°C, under the pressure of 1-50 atm., at flow rate of 1-50 cm3/min. Applicability of the flow system for low-temperature, hydrothermal-electrochemical synthesis of single-layer and multilayered thin films has been demonstrated using the BaTiO3-SrTiO3 system as an example. Single phase thin films as well as double layers have been deposited at 150°C, current density of 1 mA/cm2, and flow rates of 1-50 cm3/min. The flow rate is an important parameter allowing additional control of the films' morphology by affecting the growth rate. The multilayers can be prepared in only one experiment by simply changing the flowing solution. Processing using the solution flow cell may serve as an inexpensive and environmentally friendly way of fabricating any multilayered thin films, including magneto-optic films.

原文English
頁(從 - 到)639-649
頁數11
期刊Materials Research Society Symposium - Proceedings
517
出版狀態Published - 1998 十二月 1
事件Proceedings of the 1998 MRS Spring Symposium - San Francisco, CA, USA
持續時間: 1998 四月 151998 四月 16

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學
  • 材料力學
  • 機械工業

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