Static analysis of spiral-grooved gas film face seal in microsystem

Chi Cuong Nguyen, Hsiang Chin Jao, Wang Long Li

研究成果: Conference contribution

摘要

The steady performance of spiral-grooved gas film face seal (SGGFFS) is discussed in micro systems. The gas rarefaction effects are considered on sealing performance analysis with two important parameters of Knudsen number (Kn) and accommodation coefficients (ACs). The modified molecular gas lubrication (MMGL) equation is utilized in the analysis of micro gas sealing with considering the gas rarefaction effect. The databases of Poiseuille and Couette flow rate correctors are simultaneously applied in the MMGL equation to expand the lubrication equation with the arbitrary Kn and ACs parameters. Then, the steady-state of MMGL equation is solved by the finite element method to obtain gas pressure distribution. The load capacity is obtained by integrating the pressure distribution of gas film over the sealing face domains. Finally some curves of dimensionless load capacity are depicted for good sealing performance under the operating conditions and gas rarefactions effects.

原文English
主出版物標題2015 IFToMM World Congress Proceedings, IFToMM 2015
發行者National Taiwan University
ISBN(電子)9789860460988
DOIs
出版狀態Published - 2015 一月 1
事件14th International Federation for the Promotion of Mechanism and Machine Science World Congress, IFToMM 2015 - Taipei, Taiwan
持續時間: 2015 十月 252015 十月 30

出版系列

名字2015 IFToMM World Congress Proceedings, IFToMM 2015

Other

Other14th International Federation for the Promotion of Mechanism and Machine Science World Congress, IFToMM 2015
國家Taiwan
城市Taipei
期間15-10-2515-10-30

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • History

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