Structural and mechanical properties of pre-strained transparent conducting oxide films on flexible substrate

Po Tsung Hsieh, Tse Chang Li, Bo-Hsiung Wu, Chung Jen Chung, Jen Fin Lin

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

摘要

Among popular transparent conducting oxide (TCO) materials, indium tin oxide (ITO) and aluminum-doped zinc oxide (AZO) are expected to be the most applicable for the TCO layer of solar cells due to their resistance to a reductive ambient and their transparency to infrared wavelengths. In this study, ITO and AZO are deposited by a sputtering system with various pre-strain forces applied to the substrate. According to the X-ray diffraction results, the intensities of the characteristic peaks for ITO and AZO films decrease at a certain pre-strain ratio. Decreases for ITO and AZO films occur at pre-strain levels of 2% and 4%, respectively. Scanning electron microscopy images show that some fissures and cracks appear for the 2%-ITO film. The mechanical properties and the interface adhesion energy between the films and the substrates are investigated using a nanoindentation system. The results demonstrate that the hardness and elastic modulus of ITO and AZO thin films reach a critical point at pre-strain levels of 2% and 4%, respectively. When the pre-strain level is over 4%, cracks appear in the ITO thin film.

原文English
頁(從 - 到)443-446
頁數4
期刊Surface and Coatings Technology
231
DOIs
出版狀態Published - 2013 9月 25

All Science Journal Classification (ASJC) codes

  • 一般化學
  • 凝聚態物理學
  • 表面和介面
  • 表面、塗料和薄膜
  • 材料化學

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