Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process

P. T. Hsieh; Y. C. Chen; C. M. Wang; Y. Z. Tsai; C. C. Hu

doi:10.1109/LEOS.2005.1548274

Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process

P. T. Hsieh, Y. C. Chen, C. M. Wang, Y. Z. Tsai, C. C. Hu

研究教育組

研究成果: Conference contribution

原文	English
主出版物標題	18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005
頁面	849-850
頁數	2
DOIs	https://doi.org/10.1109/LEOS.2005.1548274
出版狀態	Published - 2005 12月 1
事件	18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005 - Sydney, Australia 持續時間: 2005 10月 22 → 2005 10月 28

出版系列

名字	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
卷	2005
ISSN（列印）	1092-8081

Other

Other	18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005
國家/地區	Australia
城市	Sydney
期間	05-10-22 → 05-10-28

All Science Journal Classification (ASJC) codes

電子、光磁材料
電氣與電子工程

存取文件

10.1109/LEOS.2005.1548274

其它文件與鏈接

引用此

Hsieh, P. T., Chen, Y. C., Wang, C. M., Tsai, Y. Z., & Hu, C. C. (2005). Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process. 於 18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005 (頁 849-850). 文章 1548274 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; 卷 2005). https://doi.org/10.1109/LEOS.2005.1548274

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title = "Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process",

author = "Hsieh, {P. T.} and Chen, {Y. C.} and Wang, {C. M.} and Tsai, {Y. Z.} and Hu, {C. C.}",

year = "2005",

month = dec,

day = "1",

doi = "10.1109/LEOS.2005.1548274",

language = "English",

isbn = "0780392175",

series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

pages = "849--850",

booktitle = "18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005",

note = "18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005 ; Conference date: 22-10-2005 Through 28-10-2005",

}

Hsieh, PT, Chen, YC, Wang, CM, Tsai, YZ & Hu, CC 2005, Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process. 於 18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005., 1548274, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 卷 2005, 頁 849-850, 18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005, Sydney, Australia, 05-10-22. https://doi.org/10.1109/LEOS.2005.1548274

Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process. / Hsieh, P. T.; Chen, Y. C.; Wang, C. M. 等.
18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005. 2005. p. 849-850 1548274 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; 卷 2005).

研究成果: Conference contribution

TY - GEN

T1 - Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process

AU - Hsieh, P. T.

AU - Chen, Y. C.

AU - Wang, C. M.

AU - Tsai, Y. Z.

AU - Hu, C. C.

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DO - 10.1109/LEOS.2005.1548274

M3 - Conference contribution

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SN - 0780392175

SN - 9780780392175

T3 - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

SP - 849

EP - 850

BT - 18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005

T2 - 18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005

Y2 - 22 October 2005 through 28 October 2005

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Hsieh PT, Chen YC, Wang CM, Tsai YZ, Hu CC. Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process. 於 18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005. 2005. p. 849-850. 1548274. (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS). doi: 10.1109/LEOS.2005.1548274