Structural characterization and electrochemical properties of RF-sputtered nanocrystalline Co3O4 thin-film anode

C. L. Liao, Y. H. Lee, S. T. Chang, K. Z. Fung

研究成果: Article同行評審

59 引文 斯高帕斯(Scopus)


Nanocrystalline Co3O4 thin-film anodes were deposited on Pt-coated silicon and 304 stainless steel by radio frequency (RF) magnetron sputtering. The as-deposited and annealed cobalt oxide thin films showed smooth and crack-free morphologies. Both the as-deposited and annealed films exhibited spinel Co3O4 phase with nanocrystalline structure. High-temperature annealing enhanced the crystallinity of RF-sputtered cobalt oxide films due to rearrangement of cobalt and oxygen atoms. Electrochemical characterization of RF-sputtered films was carried out by cyclic voltammetry and charge/discharge tests in the voltage range of 0.3-3.0 V. Cyclic voltammetry plots showed that the RF-sputtered Co3O4 thin films were electrochemically active. X-ray photoelectron spectrometer (XPS) showed that the fresh cobalt oxide films had two peaks of Co3O4. In addition to the binding energy of cobalt oxide, the XPS spectrum of discharged film presented two additional binding energies correspond to Co metal. The first discharge capacities of as-deposited, 300, 500, and 700 °C-annealed films were 722.8, 772.5, 868.4, and 1059.9 μAh cm-2 μm-1, respectively. High-temperature annealing could enhance the capacity and cycle retention obviously. After 25 cycles discharging, the annealed films showed better cycle retention than as-deposited film. The 700 °C-annealed film exhibited excellent discharge capacity approximated to the theoretical capacity.

頁(從 - 到)1379-1385
期刊Journal of Power Sources
發行號2 SPEC. ISS.
出版狀態Published - 2006 八月 25

All Science Journal Classification (ASJC) codes

  • 可再生能源、永續發展與環境
  • 能源工程與電力技術
  • 物理與理論化學
  • 電氣與電子工程


深入研究「Structural characterization and electrochemical properties of RF-sputtered nanocrystalline Co<sub>3</sub>O<sub>4</sub> thin-film anode」主題。共同形成了獨特的指紋。