Structural Design for Dimensional Stability of Thermocouples in Thermoelectric Energy Harvester

M. D. Chen, J. Y. Wang, S. M. Yang, M. H. Tsai

研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)

摘要

The design of thermoelectric energy harvester in hybrid configuration by CMOS process has been known desirable. Thermal isolation cavity on the top and/or bottom of a thermocouple to increase its thermal resistance is necessary to achieve better harvester performance. However, the thermocouple becomes suspended and may suffer from poor dimension stability on wearable device applications. This paper aims at improving the dimension stability of thermoelectric energy harvester by a structural support design. A harvester with a thermal isolation cavity of 10 μm in depth and a structural support of 4 μm in length is developed to minimize heat leakage and to provide the dimension stability of thermocouples. Compared with many previous works, the harvester design implemented by BiCMOS standard process (TSMC 0.18-μm SiGe 3P6M) is shown to achieve a superior power factor of 0.125 μW /cm2K2 and a voltage factor of 23.53 V/cm2K.

原文English
文章編號8494766
頁(從 - 到)58-64
頁數7
期刊IEEE Sensors Journal
19
發行號1
DOIs
出版狀態Published - 2019 1月 1

All Science Journal Classification (ASJC) codes

  • 儀器
  • 電氣與電子工程

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