Structural design of a silicon micro turbo generator

Kuo Shen Chen; S. Mark Spearing; Noel N. Nemeth

Structural design of a silicon micro turbo generator

Kuo Shen Chen, S. Mark Spearing, Noel N. Nemeth

機械工程學系

研究成果: Conference article › 同行評審

摘要

This paper presents the probabilistic structural analysis and design of a silicon micro turbo generator rotor. This rotor was designed to have a tip speed of 500 m/s. 3D finite element analysis, fracture strength characterization of single crystal silicon, and structural failure probability calculations were performed. The results show that the design of a micro turbo generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the fabrication process achieving a high surface quality. The overall approach, and tests employed are equally applicable to other highly stressed MEMS devices.

原文	English
頁（從 - 到）	1144-1153
頁數	10
期刊	Collection of Technical Papers - AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference
卷	2
出版狀態	Published - 1999
事件	Proceedings of the 1999 AIAA/ASME/ASCE/AHS/ASC Structrures, Structural Dynamics, and Materials Conference and Exhibit - St. Louis, MO, USA 持續時間: 1999 4月 12 → 1999 4月 15

All Science Journal Classification (ASJC) codes

建築
一般材料科學
航空工程
材料力學
機械工業

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title = "Structural design of a silicon micro turbo generator",

abstract = "This paper presents the probabilistic structural analysis and design of a silicon micro turbo generator rotor. This rotor was designed to have a tip speed of 500 m/s. 3D finite element analysis, fracture strength characterization of single crystal silicon, and structural failure probability calculations were performed. The results show that the design of a micro turbo generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the fabrication process achieving a high surface quality. The overall approach, and tests employed are equally applicable to other highly stressed MEMS devices.",

author = "Chen, {Kuo Shen} and Spearing, {S. Mark} and Nemeth, {Noel N.}",

year = "1999",

language = "English",

volume = "2",

pages = "1144--1153",

journal = "Collection of Technical Papers - AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference",

issn = "0273-4508",

publisher = "American Institute of Aeronautics and Astronautics Inc. (AIAA)",

note = "Proceedings of the 1999 AIAA/ASME/ASCE/AHS/ASC Structrures, Structural Dynamics, and Materials Conference and Exhibit ; Conference date: 12-04-1999 Through 15-04-1999",

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TY - JOUR

T1 - Structural design of a silicon micro turbo generator

AU - Chen, Kuo Shen

AU - Spearing, S. Mark

AU - Nemeth, Noel N.

PY - 1999

Y1 - 1999

N2 - This paper presents the probabilistic structural analysis and design of a silicon micro turbo generator rotor. This rotor was designed to have a tip speed of 500 m/s. 3D finite element analysis, fracture strength characterization of single crystal silicon, and structural failure probability calculations were performed. The results show that the design of a micro turbo generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the fabrication process achieving a high surface quality. The overall approach, and tests employed are equally applicable to other highly stressed MEMS devices.

AB - This paper presents the probabilistic structural analysis and design of a silicon micro turbo generator rotor. This rotor was designed to have a tip speed of 500 m/s. 3D finite element analysis, fracture strength characterization of single crystal silicon, and structural failure probability calculations were performed. The results show that the design of a micro turbo generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the fabrication process achieving a high surface quality. The overall approach, and tests employed are equally applicable to other highly stressed MEMS devices.

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UR - http://www.scopus.com/inward/citedby.url?scp=0032639296&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0032639296

SN - 0273-4508

VL - 2

SP - 1144

EP - 1153

JO - Collection of Technical Papers - AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference

JF - Collection of Technical Papers - AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference

T2 - Proceedings of the 1999 AIAA/ASME/ASCE/AHS/ASC Structrures, Structural Dynamics, and Materials Conference and Exhibit

Y2 - 12 April 1999 through 15 April 1999

ER -

Structural design of a silicon micro turbo generator

摘要

All Science Journal Classification (ASJC) codes

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