Structural design of a silicon micro turbo generator

Kuo Shen Chen, S. Mark Spearing, Noel N. Nemeth

研究成果: Conference article同行評審


This paper presents the probabilistic structural analysis and design of a silicon micro turbo generator rotor. This rotor was designed to have a tip speed of 500 m/s. 3D finite element analysis, fracture strength characterization of single crystal silicon, and structural failure probability calculations were performed. The results show that the design of a micro turbo generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the fabrication process achieving a high surface quality. The overall approach, and tests employed are equally applicable to other highly stressed MEMS devices.

頁(從 - 到)1144-1153
期刊Collection of Technical Papers - AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference
出版狀態Published - 1999
事件Proceedings of the 1999 AIAA/ASME/ASCE/AHS/ASC Structrures, Structural Dynamics, and Materials Conference and Exhibit - St. Louis, MO, USA
持續時間: 1999 4月 121999 4月 15

All Science Journal Classification (ASJC) codes

  • 建築
  • 材料科學(全部)
  • 航空工程
  • 材料力學
  • 機械工業


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