Study of a Palladium (Pd)/Aluminum-Doped Zinc Oxide (AZO) Hydrogen Sensor and the Kalman Algorithm for Internet-of-Things (IoT) Application

Wei Cheng Chen, Jing Shiuan Niu, I. Ping Liu, Cheng Yu Chi, Shiou Ying Cheng, Kun Wei Lin, Wen Chau Liu

研究成果: Article同行評審

10 引文 斯高帕斯(Scopus)


A palladium (Pd) thin film is decorated on a radio frequency (RF) sputtered aluminum-doped zinc oxide (AZO) thin film to produce a hydrogen sensor. Due to the catalytic activity of the Pd metal, the studied thin film-based device shows remarkably enhanced hydrogen-sensing characteristics. Experimentally, a very high sensing response of $1.12\times 10 ^{4}$ with a response time of 23 s is obtained under 1% H2/air gas at 300 °C. Furthermore, even under an extremely low concentration of 40-ppb H2/air, a sensing response of 0.17 is acquired. The optimal operating temperature of the studied device is 300 °C. A hypothesis is used to interpret the related hydrogen-sensing mechanism of the studied device. A thermodynamic analysis is employed to study the surface coverage of hydrogen molecules on the device's surface. Furthermore, for the application in wireless transmission of the Internet of Things (IoT), an interesting Kalman algorithm is used to reduce redundant data, save hardware costs, and reduce network congestion. The simulated results show that 93.9% of the redundant data can be removed. The studied device exhibits advantages of a simple structure, easy fabrication, low cost, a widespread sensing range of hydrogen concentration, a very high sensing response, and an extremely low detecting limit, as well as being suitable for IoT application.

頁(從 - 到)4405-4412
期刊IEEE Transactions on Electron Devices
出版狀態Published - 2020 10月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 電氣與電子工程


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