Study of a platinum nanoparticle (Pt NP)/amorphous In-Ga-Zn-O (A-IGZO) thin-film-based ammonia gas sensor

Po Lin Chen, I. Ping Liu, Wei Cheng Chen, Jing Shiuan Niu, Wen Chau Liu

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

摘要

A new ammonia (NH3) gas sensor, based on the incorporation of platinum nanoparticles (Pt NPs) and an amorphous In-Ga-Zn-O (a-IGZO) thin film, is fabricated by thermal evaporation (TE) and sputtering approaches. Due to the increased specific surface area and remarkable catalytic activity of Pt NPs, excellent ammonia sensing properties, including a very high sensing response of 1467 (in 1000 ppm NH3/air gas at 250 °C), an extremely low detecting level of 1 ppm NH3/air, a relatively low optimum operating temperature of 250 °C, and a relatively fast sensing speed, are obtained. In addition, the studied Pt NP/a-IGZO device exhibits the advantages of a simple structure, easy fabrication, and a high selectivity towards ammonia gas. The studied device is, therefore, promising for high-performance ammonia sensing applications.

原文English
文章編號128592
期刊Sensors and Actuators, B: Chemical
322
DOIs
出版狀態Published - 2020 十一月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程
  • 材料化學

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