Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering

Yu Ming Lin, Chien Hsun Chu, Hung Wei Wu, Jow-Lay Huang

研究成果: Conference contribution

2 引文 (Scopus)

摘要

In this paper, the transparent conductive aluminum-doped zinc oxide (ZnO: Al, AZO) thin films with different annealing conditions are studied. The AZO thin films were prepared on the Coring glass substrate by RF magnetron sputtering. The AZO thin films were annealed in atmosphere of vacuum and hydrogen at temperatures from 100 to 400°C in steps of 100°C for 1 min, respectively, to investigate the effects of annealing on electrical and optical properties of the films. Optimization of the prepared thin films shows low resistivity of 6.04 × 10-4 Ω-cm, mobility of 5.213 cm2/V-s, carrier concentration of 7.147 × 1020 cm-3 and a average optical transmittance of 84.89 % in the visible range at 200°C annealing temperature in hydrogen are obtained. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.

原文English
主出版物標題IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015
編輯David Dagan Feng, S. I. Ao, Craig Douglas, S. I. Ao, Craig Douglas, Jeong-A Lee, S. I. Ao, Oscar Castillo
發行者Newswood Limited
頁面807-810
頁數4
ISBN(電子)9789881925398
出版狀態Published - 2015 一月 1
事件International MultiConference of Engineers and Computer Scientists 2015, IMECS 2015 - Tsimshatsui, Kowloon, Hong Kong
持續時間: 2015 三月 182015 三月 20

出版系列

名字Lecture Notes in Engineering and Computer Science
2
ISSN(列印)2078-0958

Other

OtherInternational MultiConference of Engineers and Computer Scientists 2015, IMECS 2015
國家Hong Kong
城市Tsimshatsui, Kowloon
期間15-03-1815-03-20

指紋

Magnetron sputtering
Structural properties
Electric properties
Optical properties
Annealing
Thin films
Hydrogen
Opacity
Zinc oxide
Carrier concentration
Solar cells
Display devices
Vacuum
Aluminum
Glass
Temperature
Electrodes
Substrates

All Science Journal Classification (ASJC) codes

  • Computer Science (miscellaneous)

引用此文

Lin, Y. M., Chu, C. H., Wu, H. W., & Huang, J-L. (2015). Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering. 於 D. D. Feng, S. I. Ao, C. Douglas, S. I. Ao, C. Douglas, J-A. Lee, S. I. Ao, ... O. Castillo (編輯), IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015 (頁 807-810). (Lecture Notes in Engineering and Computer Science; 卷 2). Newswood Limited.
Lin, Yu Ming ; Chu, Chien Hsun ; Wu, Hung Wei ; Huang, Jow-Lay. / Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering. IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015. 編輯 / David Dagan Feng ; S. I. Ao ; Craig Douglas ; S. I. Ao ; Craig Douglas ; Jeong-A Lee ; S. I. Ao ; Oscar Castillo. Newswood Limited, 2015. 頁 807-810 (Lecture Notes in Engineering and Computer Science).
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abstract = "In this paper, the transparent conductive aluminum-doped zinc oxide (ZnO: Al, AZO) thin films with different annealing conditions are studied. The AZO thin films were prepared on the Coring glass substrate by RF magnetron sputtering. The AZO thin films were annealed in atmosphere of vacuum and hydrogen at temperatures from 100 to 400°C in steps of 100°C for 1 min, respectively, to investigate the effects of annealing on electrical and optical properties of the films. Optimization of the prepared thin films shows low resistivity of 6.04 × 10-4 Ω-cm, mobility of 5.213 cm2/V-s, carrier concentration of 7.147 × 1020 cm-3 and a average optical transmittance of 84.89 {\%} in the visible range at 200°C annealing temperature in hydrogen are obtained. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.",
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Lin, YM, Chu, CH, Wu, HW & Huang, J-L 2015, Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering. 於 DD Feng, SI Ao, C Douglas, SI Ao, C Douglas, J-A Lee, SI Ao & O Castillo (編輯), IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015. Lecture Notes in Engineering and Computer Science, 卷 2, Newswood Limited, 頁 807-810, International MultiConference of Engineers and Computer Scientists 2015, IMECS 2015, Tsimshatsui, Kowloon, Hong Kong, 15-03-18.

Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering. / Lin, Yu Ming; Chu, Chien Hsun; Wu, Hung Wei; Huang, Jow-Lay.

IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015. 編輯 / David Dagan Feng; S. I. Ao; Craig Douglas; S. I. Ao; Craig Douglas; Jeong-A Lee; S. I. Ao; Oscar Castillo. Newswood Limited, 2015. p. 807-810 (Lecture Notes in Engineering and Computer Science; 卷 2).

研究成果: Conference contribution

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T1 - Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering

AU - Lin, Yu Ming

AU - Chu, Chien Hsun

AU - Wu, Hung Wei

AU - Huang, Jow-Lay

PY - 2015/1/1

Y1 - 2015/1/1

N2 - In this paper, the transparent conductive aluminum-doped zinc oxide (ZnO: Al, AZO) thin films with different annealing conditions are studied. The AZO thin films were prepared on the Coring glass substrate by RF magnetron sputtering. The AZO thin films were annealed in atmosphere of vacuum and hydrogen at temperatures from 100 to 400°C in steps of 100°C for 1 min, respectively, to investigate the effects of annealing on electrical and optical properties of the films. Optimization of the prepared thin films shows low resistivity of 6.04 × 10-4 Ω-cm, mobility of 5.213 cm2/V-s, carrier concentration of 7.147 × 1020 cm-3 and a average optical transmittance of 84.89 % in the visible range at 200°C annealing temperature in hydrogen are obtained. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.

AB - In this paper, the transparent conductive aluminum-doped zinc oxide (ZnO: Al, AZO) thin films with different annealing conditions are studied. The AZO thin films were prepared on the Coring glass substrate by RF magnetron sputtering. The AZO thin films were annealed in atmosphere of vacuum and hydrogen at temperatures from 100 to 400°C in steps of 100°C for 1 min, respectively, to investigate the effects of annealing on electrical and optical properties of the films. Optimization of the prepared thin films shows low resistivity of 6.04 × 10-4 Ω-cm, mobility of 5.213 cm2/V-s, carrier concentration of 7.147 × 1020 cm-3 and a average optical transmittance of 84.89 % in the visible range at 200°C annealing temperature in hydrogen are obtained. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.

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PB - Newswood Limited

ER -

Lin YM, Chu CH, Wu HW, Huang J-L. Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering. 於 Feng DD, Ao SI, Douglas C, Ao SI, Douglas C, Lee J-A, Ao SI, Castillo O, 編輯, IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015. Newswood Limited. 2015. p. 807-810. (Lecture Notes in Engineering and Computer Science).