Study of beveled angle effect on morphology of dual damascene via filling using ionized physical vapor deposition

Chi Chuan Hwang, Jee Gong Chang, Ming Hang Weng, Hong Chang Lin

研究成果: Article同行評審

4 引文 斯高帕斯(Scopus)
原文English
頁(從 - 到)2404-2410
頁數7
期刊Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
21
發行號6
DOIs
出版狀態Published - 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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