Study of diffusion and quality control for CoSi2 formation by oxide-mediated cobalt silicidation with Ti capping

Juin Jie Chang, Chuan Pu Liu, Tsung Eong Hsieh, Ying Lang Wang

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy