Study of nanoindentation using FEM atomic model

Yeau-Ren Jeng, Chung Ming Tan

研究成果: Article同行評審

31 引文 斯高帕斯(Scopus)

摘要

This paper adopts an atomic-scale model based on the nonlinear finite element formulation to analyze the stress and strain induced in a very thin film during the nanoindentation process. The deformation evolution during the nanoindentation process is evaluated using the quasi-static method, thereby greatly reducing the required computation time. The finite element simulation results indicate that the microscopic plastic deformation in the thin film is caused by instability of its crystalline structure, and that the magnitude of the nanohardness varies with the maximum indentation depth and the geometry of the indenter.

原文English
頁(從 - 到)767-774
頁數8
期刊Journal of Tribology
126
發行號4
DOIs
出版狀態Published - 2004 10月 1

All Science Journal Classification (ASJC) codes

  • 材料力學
  • 機械工業
  • 表面和介面
  • 表面、塗料和薄膜

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