TY - JOUR
T1 - Study of photo-resistance and polyimide strip by atmospheric plasma technology
AU - Liu, Wen Jen
AU - Lan, Yung Chiang
AU - Chen, Yong Chih
AU - Lo, Wan Chung
AU - Lin, Chao Hsien
N1 - Funding Information:
The authors would like to acknowledge the discussions and the support for the manufacturing process by the National Nano Device Laboratory staff, in particular, Dr. Weng Min-Hang. The National Science Council of the Republic of China under contract number NSC93-2662-E-214-009-CC3 financially supported this work.
PY - 2007/4/23
Y1 - 2007/4/23
N2 - In this study, parallel-tube (PT) and plasma jet (PJ) dielectric barrier discharge (DBD) electrodes and alternating voltage (AC) generators with sinusoidal and pulsed types AC generators at voltage of 10 kV and frequency of 20 kHz, respectively, were selected for the investigation of the influences of these hardware combinations on the removal differences of photo-resistances (PRs) and polyimide (PI). Plasma ignition occurred with the flowing of clean dry air (CDA) for these self-designed PT- and PJ-DBD systems. The atmospheric plasma system consisting of PJ-DBD and pulsed type AC generator exhibited reasonable PR removal ability with no discharging phenomena and with more polar functional groups, and is recommended for these polymers removal.
AB - In this study, parallel-tube (PT) and plasma jet (PJ) dielectric barrier discharge (DBD) electrodes and alternating voltage (AC) generators with sinusoidal and pulsed types AC generators at voltage of 10 kV and frequency of 20 kHz, respectively, were selected for the investigation of the influences of these hardware combinations on the removal differences of photo-resistances (PRs) and polyimide (PI). Plasma ignition occurred with the flowing of clean dry air (CDA) for these self-designed PT- and PJ-DBD systems. The atmospheric plasma system consisting of PJ-DBD and pulsed type AC generator exhibited reasonable PR removal ability with no discharging phenomena and with more polar functional groups, and is recommended for these polymers removal.
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U2 - 10.1016/j.surfcoat.2006.09.061
DO - 10.1016/j.surfcoat.2006.09.061
M3 - Article
AN - SCOPUS:33847398739
VL - 201
SP - 6530
EP - 6535
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 15
ER -