Study of the sensitivity of the first four flexural modes of an AFM cantilever with a sidewall probe

Win Jin Chang, Haw Long Lee, Terry Yuan-Fang Chen

研究成果: Article同行評審

41 引文 斯高帕斯(Scopus)

摘要

The resonant frequency and sensitivity of flexural vibration for an atomic force microscope (AFM) cantilever with a sidewall probe have been analyzed. A closed-form expression for the sensitivity of vibration modes has been obtained using the relationship between the resonant frequency and contact stiffness of cantilever and sample. The results show that a sidewall scanning AFM is more sensitive when the contact stiffness is lower and that the first mode is the most sensitive. However, the high-order modes become more sensitive than the low-order modes as the contact stiffness increases. The resonance frequency of an AFM cantilever is low when contact stiffness is small. However, the frequency rapidly increases as contact stiffness increases. In addition, it can be found that the effects of the vertical extension on the sensitivity and the resonant frequency of an AFM cantilever are significant. Decreasing the length of vertical extension can increase the resonance frequency and sensitivity of mode 1 when the contact stiffness is small. However, the situation is reverse when the contact stiffness becomes large.

原文English
頁(從 - 到)619-624
頁數6
期刊Ultramicroscopy
108
發行號7
DOIs
出版狀態Published - 2008 六月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 儀器

指紋

深入研究「Study of the sensitivity of the first four flexural modes of an AFM cantilever with a sidewall probe」主題。共同形成了獨特的指紋。

引用此