Study of working pressure on the optoelectrical properties of Al-Y codoped ZnO thin-film deposited using DC magnetron sputtering for solar cell applications

Feng Hao Hsu, Na Fu Wang, Yu Zen Tsai, Ming Chieh Chuang, Yu Song Cheng, Mau Phon Houng

研究成果: Article

18 引文 (Scopus)

摘要

Low cost transparent conductive Al-Y codoped ZnO (AZOY) thin-films were prepared on a glass substrate using a DC magnetron sputtering technique with various working pressures in the range of 5-13 mTorr. The relationship among the structural, electrical, and optical properties of sputtered AZOY films was studied as a function of working pressure. The XRD measurements show that the crystallinity of the films degraded as the working gas pressure increased. The AZOY thin-film deposited at a working pressure of 5 mTorr exhibited the lowest electrical resistivity of 4.3 × 10 -4 Ω cm, carrier mobility of 30 cm 2 /V s, highest carrier concentration of 4.9 × 10 20 cm -3 , and high transmittance in the visible region (400-800 nm) of approximately 90%. Compared with Al doped ZnO (AZO) thin-films deposited using DC or RF magnetron sputtering methods, a high carrier mobility was observed in our AZOY thin-films. This result can be used to effectively decrease the absorption of near infrared-rays in solar cell applications. The mechanisms are attributed to the larger transition energy between Ar atoms and sputtering particles and the size compensation of the dopants. Finally, the optimal quality AZOY thin-film was used as an emitter layer (or window layer) to form AZOY/n-Si heterojunction solar cells, which exhibited a stable conversion efficiency (η) of 9.4% under an AM1.5 illumination condition.

原文English
頁(從 - 到)104-108
頁數5
期刊Applied Surface Science
280
DOIs
出版狀態Published - 2013 九月 1

指紋

Magnetron sputtering
Solar cells
magnetron sputtering
solar cells
direct current
Thin films
thin films
Carrier mobility
carrier mobility
Conversion efficiency
gas pressure
Carrier concentration
Sputtering
Heterojunctions
Structural properties
heterojunctions
crystallinity
transmittance
rays
emitters

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

引用此文

@article{0e318dae38144babbebe98017aea8803,
title = "Study of working pressure on the optoelectrical properties of Al-Y codoped ZnO thin-film deposited using DC magnetron sputtering for solar cell applications",
abstract = "Low cost transparent conductive Al-Y codoped ZnO (AZOY) thin-films were prepared on a glass substrate using a DC magnetron sputtering technique with various working pressures in the range of 5-13 mTorr. The relationship among the structural, electrical, and optical properties of sputtered AZOY films was studied as a function of working pressure. The XRD measurements show that the crystallinity of the films degraded as the working gas pressure increased. The AZOY thin-film deposited at a working pressure of 5 mTorr exhibited the lowest electrical resistivity of 4.3 × 10 -4 Ω cm, carrier mobility of 30 cm 2 /V s, highest carrier concentration of 4.9 × 10 20 cm -3 , and high transmittance in the visible region (400-800 nm) of approximately 90{\%}. Compared with Al doped ZnO (AZO) thin-films deposited using DC or RF magnetron sputtering methods, a high carrier mobility was observed in our AZOY thin-films. This result can be used to effectively decrease the absorption of near infrared-rays in solar cell applications. The mechanisms are attributed to the larger transition energy between Ar atoms and sputtering particles and the size compensation of the dopants. Finally, the optimal quality AZOY thin-film was used as an emitter layer (or window layer) to form AZOY/n-Si heterojunction solar cells, which exhibited a stable conversion efficiency (η) of 9.4{\%} under an AM1.5 illumination condition.",
author = "Hsu, {Feng Hao} and Wang, {Na Fu} and Tsai, {Yu Zen} and Chuang, {Ming Chieh} and Cheng, {Yu Song} and Houng, {Mau Phon}",
year = "2013",
month = "9",
day = "1",
doi = "10.1016/j.apsusc.2013.04.103",
language = "English",
volume = "280",
pages = "104--108",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",

}

Study of working pressure on the optoelectrical properties of Al-Y codoped ZnO thin-film deposited using DC magnetron sputtering for solar cell applications. / Hsu, Feng Hao; Wang, Na Fu; Tsai, Yu Zen; Chuang, Ming Chieh; Cheng, Yu Song; Houng, Mau Phon.

於: Applied Surface Science, 卷 280, 01.09.2013, p. 104-108.

研究成果: Article

TY - JOUR

T1 - Study of working pressure on the optoelectrical properties of Al-Y codoped ZnO thin-film deposited using DC magnetron sputtering for solar cell applications

AU - Hsu, Feng Hao

AU - Wang, Na Fu

AU - Tsai, Yu Zen

AU - Chuang, Ming Chieh

AU - Cheng, Yu Song

AU - Houng, Mau Phon

PY - 2013/9/1

Y1 - 2013/9/1

N2 - Low cost transparent conductive Al-Y codoped ZnO (AZOY) thin-films were prepared on a glass substrate using a DC magnetron sputtering technique with various working pressures in the range of 5-13 mTorr. The relationship among the structural, electrical, and optical properties of sputtered AZOY films was studied as a function of working pressure. The XRD measurements show that the crystallinity of the films degraded as the working gas pressure increased. The AZOY thin-film deposited at a working pressure of 5 mTorr exhibited the lowest electrical resistivity of 4.3 × 10 -4 Ω cm, carrier mobility of 30 cm 2 /V s, highest carrier concentration of 4.9 × 10 20 cm -3 , and high transmittance in the visible region (400-800 nm) of approximately 90%. Compared with Al doped ZnO (AZO) thin-films deposited using DC or RF magnetron sputtering methods, a high carrier mobility was observed in our AZOY thin-films. This result can be used to effectively decrease the absorption of near infrared-rays in solar cell applications. The mechanisms are attributed to the larger transition energy between Ar atoms and sputtering particles and the size compensation of the dopants. Finally, the optimal quality AZOY thin-film was used as an emitter layer (or window layer) to form AZOY/n-Si heterojunction solar cells, which exhibited a stable conversion efficiency (η) of 9.4% under an AM1.5 illumination condition.

AB - Low cost transparent conductive Al-Y codoped ZnO (AZOY) thin-films were prepared on a glass substrate using a DC magnetron sputtering technique with various working pressures in the range of 5-13 mTorr. The relationship among the structural, electrical, and optical properties of sputtered AZOY films was studied as a function of working pressure. The XRD measurements show that the crystallinity of the films degraded as the working gas pressure increased. The AZOY thin-film deposited at a working pressure of 5 mTorr exhibited the lowest electrical resistivity of 4.3 × 10 -4 Ω cm, carrier mobility of 30 cm 2 /V s, highest carrier concentration of 4.9 × 10 20 cm -3 , and high transmittance in the visible region (400-800 nm) of approximately 90%. Compared with Al doped ZnO (AZO) thin-films deposited using DC or RF magnetron sputtering methods, a high carrier mobility was observed in our AZOY thin-films. This result can be used to effectively decrease the absorption of near infrared-rays in solar cell applications. The mechanisms are attributed to the larger transition energy between Ar atoms and sputtering particles and the size compensation of the dopants. Finally, the optimal quality AZOY thin-film was used as an emitter layer (or window layer) to form AZOY/n-Si heterojunction solar cells, which exhibited a stable conversion efficiency (η) of 9.4% under an AM1.5 illumination condition.

UR - http://www.scopus.com/inward/record.url?scp=84879687559&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84879687559&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2013.04.103

DO - 10.1016/j.apsusc.2013.04.103

M3 - Article

AN - SCOPUS:84879687559

VL - 280

SP - 104

EP - 108

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

ER -