摘要
The V-groove MOSFETs capable of generating high performance transistor characteristics of sub-40 nm was demonstrated. MOSFETs with source and drain separation down to Lg=36 nm exhibiting a definite state of electric characteristics were presented. The output characteristics of 36 nm V-groove MOSFET, the corresponding sub-threshold and transfer characteristics as well as characteristics for V-groove openings were discussed. The intrinsic output resistance was also calculated.
原文 | English |
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頁面 | 95-96 |
頁數 | 2 |
出版狀態 | Published - 2001 |
事件 | Device Research Conference (DRC) - Notre Dame, IN, United States 持續時間: 2001 6月 25 → 2001 6月 27 |
Conference
Conference | Device Research Conference (DRC) |
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國家/地區 | United States |
城市 | Notre Dame, IN |
期間 | 01-06-25 → 01-06-27 |
All Science Journal Classification (ASJC) codes
- 工程 (全部)