Surface and material characteristics of Ga2O3 thin films on GaAs

Ping Fong Huang, Yen Ting Chen, H. Y. Lee, Zhe Chuan Feng, Hao Hsiung Lin, Weijie Lu

研究成果: Conference contribution

3 引文 斯高帕斯(Scopus)

摘要

Surface and material properties of dielectric Ga2O3 thin films deposited onto GaAs substrate with different annealing temperature were studied via a variety of techniques, including X-ray diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), scanning electron microscope (SEM) and energy dispersive X-ray spectroscopy (EDX). The effects of annealing are investigated. The increase of ratio of oxygen to gallium assuredly as the annealing temperature increased was found. The relationship between the interface quality and annealing temperature is identified.

原文English
主出版物標題Advances in Thin-Film Coatings for Optical Applications V
DOIs
出版狀態Published - 2008
事件Advances in Thin-Film Coatings for Optical Applications V - San Diego, CA, United States
持續時間: 2008 八月 112008 八月 11

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
7067
ISSN(列印)0277-786X

Conference

ConferenceAdvances in Thin-Film Coatings for Optical Applications V
國家/地區United States
城市San Diego, CA
期間08-08-1108-08-11

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

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