摘要
Surface characterization of a homoepitaxial β-FeSi2 film grown on a β-FeSi2 single crystal synthesized with a temperaturegradient solution method was performed by X-ray photoelectron spectroscopy (XPS) and X-ray absorption spectroscopy (XAS). The annealing to remove native oxide layers on the crystal before homoepitaxial growth induced the formation of Fe-rich silicide in the surface. The XAS spectra confirm that the homoepitaxial β-FeSi2 film can be grown on the crystal, while Fe-rich silicide is partially formed. The control of the surface chemical state is important to obtain homoepitaxial films with excellent quality.
原文 | English |
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頁(從 - 到) | 150-153 |
頁數 | 4 |
期刊 | Physics Procedia |
卷 | 11 |
DOIs | |
出版狀態 | Published - 2011 |
All Science Journal Classification (ASJC) codes
- 物理與天文學 (全部)