Surface-micromachined optical interferometry system utilizing three-dimensional micromirrors and microgratings

Ju Nan Kuo, Gwo Bin Lee, Wen Fung Pan

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

摘要

This paper presents a novel micro-optical interferometer incorporating three-dimensional micromirrors and microgratings. The interferometry system comprises a fixed grating mirror, two rotatable reflection mirrors, and a movable grating mirror driven by an electrostatically actuated oscillating structure. The use of a curved polysilicon structure lowers the electrostatic operating voltage (4 V) of the oscillating structure substantially and permits high-speed movement (2 kHz) of the grating. The novel system presented in this study provides a wider modulation frequency, and hence a wider frequency response. Furthermore, the proposed micro-optical interferometer can be applied to a micro-optical bench to facilitate signal modulation and precision measurement applications.

原文English
頁(從 - 到)L668-L671
期刊Japanese Journal of Applied Physics
44
發行號20-23
DOIs
出版狀態Published - 2005

All Science Journal Classification (ASJC) codes

  • 一般工程
  • 一般物理與天文學

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