TY - JOUR
T1 - Surface passivation function of indium-tin-oxide-based nanorod structural sensors
AU - Lin, Tzu Shun
AU - Lee, Ching Ting
AU - Lee, Hisn Ying
AU - Lin, Chih Chien
N1 - Funding Information:
This work was supported by the National Science Council of Taiwan, ROC under the NSC-99-2221-E-006-208-MY3 .
PY - 2012/8/15
Y1 - 2012/8/15
N2 - Employing self-shadowing traits of an oblique-angle electron-beam deposition system, various indium tin oxide (ITO) nanorod arrays were deposited on a silicon substrate and used as extended-gate field-effect-transistor (EGFET) pH sensors. The length and morphology of the deposited ITO nanorod arrays could be changed and controlled under different deposition conditions. The ITO nanorod structural EGFET pH sensors exhibited high sensing performances owing to the larger sensing surface area. The sensitivity of the pH sensors with 150-nm-length ITO nanorod arrays was 53.96 mV/pH. By using the photoelectrochemical treatment of the ITO nanorod arrays, the sensitivity of the pH sensors with 150-nm-length passivated ITO nanorod arrays was improved to 57.21 mV/pH.
AB - Employing self-shadowing traits of an oblique-angle electron-beam deposition system, various indium tin oxide (ITO) nanorod arrays were deposited on a silicon substrate and used as extended-gate field-effect-transistor (EGFET) pH sensors. The length and morphology of the deposited ITO nanorod arrays could be changed and controlled under different deposition conditions. The ITO nanorod structural EGFET pH sensors exhibited high sensing performances owing to the larger sensing surface area. The sensitivity of the pH sensors with 150-nm-length ITO nanorod arrays was 53.96 mV/pH. By using the photoelectrochemical treatment of the ITO nanorod arrays, the sensitivity of the pH sensors with 150-nm-length passivated ITO nanorod arrays was improved to 57.21 mV/pH.
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U2 - 10.1016/j.apsusc.2012.03.168
DO - 10.1016/j.apsusc.2012.03.168
M3 - Article
AN - SCOPUS:84862902309
SN - 0169-4332
VL - 258
SP - 8415
EP - 8418
JO - Applied Surface Science
JF - Applied Surface Science
IS - 21
ER -