Suspended few-layer graphene beam electromechanical switch with abrupt on-off characteristics and minimal leakage current

Sung Min Kim, Emil B. Song, Sejoon Lee, Sunae Seo, David H. Seo, Yongha Hwang, R. Candler, Kang L. Wang

研究成果: Article同行評審

62 引文 斯高帕斯(Scopus)

摘要

Suspended few-layer graphene beam electro-mechanical switches (SGSs) with 0.15 m air-gap are fabricated and electrically characterized. The SGS shows an abrupt on/off current characteristics with minimal off current. In conjunction with the narrow air-gap, the outstanding mechanical properties of graphene enable the mechanical switch to operate at a very low pull-in voltage (V PI) of 1.85 V, which is compatible with conventional complimentary metal-oxide-semiconductor (CMOS) circuit requirements. In addition, we show that the pull-in voltage exhibits an inverse dependence on the beam length.

原文English
文章編號023103
期刊Applied Physics Letters
99
發行號2
DOIs
出版狀態Published - 2011 七月 11

All Science Journal Classification (ASJC) codes

  • 物理與天文學(雜項)

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