Synthesis and characterization of a naphthoquinonediazide positive photoresist derived from bis(hydroxymethyl)phenol

Jui‐Hsiang ‐H Liu, Huang‐Tsai ‐T Liu, Fu‐Ren ‐R Tsai

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

A new photosensitive naphthoquinonediazide (NQD) was synthesized from 2,6‐bis‐(hydroxymethyl)‐3,4‐dimethylphenol and toluene diisocyante. NQD was identified by using IR, NMR and elemental analyses. Photobleachable characteristics were evaluated by UV spectrophotometry. Applications of the NQD on the photolithography as a positive working photoresist were investigated. The aqueous solution of NQD, novolak, cellosolve acetate, and DMF was used as a photosensitive material. It was found that NQD synthesized in this investigation can be used as an effective component in a positive photoresist. Optimal conditions of the UV dose, coating thickness, and development of the resist system were estimated. Resolution of the positive resist was evaluated by SEM technique. Effects of UV dose, exposure time, development time, and exposure UV wave length on the sensitivity and resolution of the photoresist were investigated.

原文English
頁(從 - 到)63-72
頁數10
期刊Die Angewandte Makromolekulare Chemie
229
發行號1
DOIs
出版狀態Published - 1995 七月

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)

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