Synthesis and characterization of water‐soluble diazonium salts as contrast‐enhancement materials

Jui‐Hsiang ‐H Liu, Chi‐Fon ‐F Her, Hung‐Tsai ‐T Liu, Yi‐Chang ‐C Chung

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

摘要

Water soluble aromatic diazonium double salts, p‐diazodiphenylamine chloride zinc chloride (DZS‐1) and p‐diazoanisol chloride zinc chloride (DZS‐2), have been evaluated as photobleachable dyes for contrast enhancement lithography. After testing the bleaching characteristics, aqueous solutions of DZS‐1 and poly(vinyl alcohol) were used as a contrast enhancement material. Thermal stability, resist contrast, exposure parameters and other bleaching characteristics of the photobleachable membranes were investigated. A. commercial i‐line photoresist was used to evaluate the contrast ratio of the DZS‐1/PVA CEL layer. The contrast ratio obtained in this investigation is 1.67.

原文English
頁(從 - 到)133-144
頁數12
期刊Die Angewandte Makromolekulare Chemie
224
發行號1
DOIs
出版狀態Published - 1995 一月

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)

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