Water soluble aromatic diazonium double salts, p‐diazodiphenylamine chloride zinc chloride (DZS‐1) and p‐diazoanisol chloride zinc chloride (DZS‐2), have been evaluated as photobleachable dyes for contrast enhancement lithography. After testing the bleaching characteristics, aqueous solutions of DZS‐1 and poly(vinyl alcohol) were used as a contrast enhancement material. Thermal stability, resist contrast, exposure parameters and other bleaching characteristics of the photobleachable membranes were investigated. A. commercial i‐line photoresist was used to evaluate the contrast ratio of the DZS‐1/PVA CEL layer. The contrast ratio obtained in this investigation is 1.67.
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