System and method for automatic virtual metrology

貢獻的翻譯標題: 全自動化型虛擬量測的伺服器與系統及方法

Fan-Tien Cheng (Inventor)

研究成果: Patent

摘要

全自動化型虛擬量測的伺服器與系統及方法
原文English
專利號特許4914457
出版狀態Published - 2009 一月 27

引用此文

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title = "System and method for automatic virtual metrology",
abstract = "全自動化型虛擬量測的伺服器與系統及方法",
author = "Fan-Tien Cheng",
year = "2009",
month = "1",
day = "27",
language = "English",
type = "Patent",
note = "特許4914457",

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T1 - System and method for automatic virtual metrology

AU - Cheng, Fan-Tien

PY - 2009/1/27

Y1 - 2009/1/27

N2 - 全自動化型虛擬量測的伺服器與系統及方法

AB - 全自動化型虛擬量測的伺服器與系統及方法

M3 - Patent

M1 - 特許4914457

ER -

Cheng F-T, 發明者. System and method for automatic virtual metrology. 特許4914457. 2009 1月 27.